JPS58129205A - Method and device for inspecting articles automatically - Google Patents

Method and device for inspecting articles automatically

Info

Publication number
JPS58129205A
JPS58129205A JP1247582A JP1247582A JPS58129205A JP S58129205 A JPS58129205 A JP S58129205A JP 1247582 A JP1247582 A JP 1247582A JP 1247582 A JP1247582 A JP 1247582A JP S58129205 A JPS58129205 A JP S58129205A
Authority
JP
Japan
Prior art keywords
camera
signal
output
background
video signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1247582A
Other languages
Japanese (ja)
Other versions
JPS6332123B2 (en
Inventor
Atsushi Sako
酒向 淳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON KEISOKU KOGYO KK
Original Assignee
NIPPON KEISOKU KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON KEISOKU KOGYO KK filed Critical NIPPON KEISOKU KOGYO KK
Priority to JP1247582A priority Critical patent/JPS58129205A/en
Publication of JPS58129205A publication Critical patent/JPS58129205A/en
Publication of JPS6332123B2 publication Critical patent/JPS6332123B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/04Sorting according to size
    • B07C5/10Sorting according to size measured by light-responsive means

Abstract

PURPOSE:To inspect articles to be inspected instantaneously without collating with reference picture images by picking up the images of said articles with TV cameras, obtaining the video signals for the focussed images thereof and the out-of-focus images thereof, binary coding both video signals to obtain differences between the same, and erasing the background signals. CONSTITUTION:Level controllers for video signals Ev1 and Ev2 obtained from the 1st TV camera 3 which is focused and the 2nd camera 4 which is out of focus are defined as 7 and 8 in figure. The 1st comparator 11 compares the video signal E'v1 with the 1st threshold level voltage Et1 from a reference voltage generator 12 and outputs the 1st binary coded signal Eb1 which goes to a 1 when said signal is larger than the value thereof and to a 0 when the signal is below said value. The 2nd comparator 13 compares the video signal E'v2 with a threshold voltage Et2 as well and outputs the binary coded signal Eb2. An exclusive-OR circuit 15 takes the difference between these two binary coded signals and outputs the absolute value thereof which goes to a 0 when both Eb1 and Eb2 are 0 or 1. Therefore, the background pulses are erased, and the decision, discrimination, etc. of whether the articles to be inspected are defective or nondefective are made possible by drawing out only the characteristic pulses.

Description

【発明の詳細な説明】 本発明はテレピノ冒ンカメラで被検査物品を逢儂して映
像信号を処理することによ襲吻品O外■中形状を検査す
る、物品の自動検査方法及び錬方法を実施する自動検査
装置に関するもので参る。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides an automatic inspection method and method for inspecting an object for inspecting the outside and inside shape of the object by viewing the object with a telescope camera and processing the video signal. This article relates to automatic inspection equipment that performs.

(畢) 勇品の欠陥の検出中、製品の識別等を自動的に行なう自
動検査方法として、テレビシ璽ンカメラで被検査物品を
撮像して4丸像を予め記憶させておい友基準−儂と比較
する方式のものが種々提案されている。しかしながらこ
の樵の方式のものでは、−儂を記憶させる丸めに容赦の
大きい紀億装−を必要とする上に11IIIa1kg4
算装置を必要とする丸め装置が高価になる欠点が6−)
た、′11た被検査物品の−1と基準画像との比較に時
間七豐する丸め、検査に豐する時間が長くなり、生産ラ
インでの検411には不向龜であり九。ま九この方式で
は、基準l#iIIと被検査物品の画像との位置合せを
正確に行なう必要がhυ、生産ラインでの検査で14品
を撮像するタイ建ンダがずれると誤検査を生じる欠点が
62九。
(绢) As an automatic inspection method that automatically performs product identification while detecting defects in quality products, a television screen camera is used to take an image of the item to be inspected, and 4-circle images are stored in advance. Various comparison methods have been proposed. However, this woodcutter's method requires a very lenient rounding tool to remember me, and it also requires 11IIIa1kg4
The drawback is that the rounding device that requires a calculation device is expensive 6-)
In addition, it takes a long time to compare the -1 of the inspected article with the reference image, which increases the time required for inspection, making it unsuitable for inspection on a production line. In this method, it is necessary to accurately align the reference l#iII and the image of the item to be inspected, and there is a drawback that incorrect inspection may occur if the tie lines used to image the 14 items during inspection on the production line are misaligned. is 629.

本発明の目的は、基準−像との照合を行なうことなく、
被検査物品の映gII(1号を処理するのみで被検査物
品の検査を行なうことができるようくして上記の欠点を
解消した物品の自動検査方法及び#lfを提供すること
KToる。
The purpose of the present invention is to
It is an object of the present invention to provide an automatic inspection method and #lf for an article which eliminates the above-mentioned drawbacks by making it possible to inspect an article to be inspected only by processing the image gII (No. 1) of the article to be inspected.

本発明の検査方法は、被検査物品をテレピノ。In the inspection method of the present invention, the article to be inspected is telescoped.

ンカメラで撮像して焦点0合りえ謳10映像信漫と焦点
のずれた第20峡像信号とを得る過程と、前記第1の映
像信号を特徴抽出の九めE)m I C)スレシ、〜ル
ドレペルと比較することによ〉3値化して特徴/lルス
と背景Δルスとを含むallの2値化信号を得る過程と
、第2の映像値4#を第20スレシ1−ルドレベルと比
較するヒとによ)al102値化信号の背景Δルス−と
同−幅同一位棒ownΔルスからなる第2の2値化信号
を得る過程と、11Ilc)2値化信号と纂2の2値化
信号とOIIをとりて背景Δルスを消去することKよ)
脣黴藝分O情報會職出すAllとを行なうこと1−特徴
とするものである。
a step of capturing an image with a camera to obtain a 10th image signal in focus and a 20th out-of-focus image signal; and extracting features from the first image signal. The process of ternarizing and obtaining all the binarized signals including the feature/l las and the background Δ las by comparing the second image value 4# with the 20th threshold level. 11Ilc) The process of obtaining a second binarized signal consisting of a bar ownΔlus of the same width as the background Δlus of the binarized signal, and 11Ilc) The binarized signal and the summary 2 Take the value signal and OII and erase the background Δlus)
1-Characteristics: 1-Characteristics: 1-Characteristics: 1-Characteristics:

以下図示O実施例により本発−O幽勤検量方法及び装置
tWsに説明する。
Hereinafter, the present invention will be explained with reference to the illustrated embodiment.

第1図は、2台のテレビジ曹ンカメツを用−て本発明を
実施する場合OカメツO位置関係と光学系O構成例と七
本したもので、同図におiてl紘コンベア、ターンチー
クル等の搬送装置、2は搬送装置1の上に装置された被
検査物品である。3及び4はそれでれ41及び嬉2のテ
レビ−)Wンカメラで、$1Oテレピノ嘗ンカメラ3は
そのレンI 3 mを被検査物品2に向けて配置され、
第2のテレピノ1ンカメツ4はjlElのテレピノ冒ン
カメラ3の側方に並べて配置されている。第1のテレピ
ノ璽ンカメラ3のレンズ3aと被検16品2との間には
へ−フィラー5が45”O傾斜角で設けられ、遺檎査御
品2からの光の一部がこのハーフミラ−を通してdll
のテレビジ璽ンカメラ3に入射するようになりている。
FIG. 1 shows seven examples of the positional relationship and the configuration of the optical system when the present invention is implemented using two television sets. A transport device such as teakle, etc., and 2 are objects to be inspected that are placed on top of the transport device 1. 3 and 4 are TV cameras of 41 and 2, and the $10 TV camera 3 is arranged with its lens I 3 m facing the inspected article 2,
The second telepino camera 4 is arranged side by side with the telepino camera 3 of jlEl. A filler 5 is provided between the lens 3a of the first telescope camera 3 and the 16 items 2 to be inspected at an angle of inclination of 45''O, and a portion of the light from the 16 items 2 to be inspected passes through this half mirror. - through dll
The light is incident on the television camera 3 of the camera.

42のテレピノ1ンカメツ4のレン、e 4 mの前方
には反射鏡6が配置され、ハーフζチー5で反射した被
検査物品2からの光の一部が反射鏡6を経てlI2のテ
レピノ冒ンカメラ4に入射するようKなっている。し九
がって第1及び742のテレビジ冒ンカメラ3及び4は
被検査物品2を同じ角度から見た像を一時に撮像する。
A reflector 6 is disposed in front of the lens 4 of the telepino 1 linker 4 of No. 42, and a portion of the light from the inspected article 2 reflected by the half K is set so that the light is incident on camera 4. Therefore, the first and 742nd television cameras 3 and 4 simultaneously capture images of the inspected article 2 viewed from the same angle.

そして本夷總@K>いては、第1のテレビジ璽ンカメラ
3のレンズの焦点を被検査物品2に合せ、1112Oテ
レビシ17倉メラ4のレンツの焦点は被(・) 検査物品からずらしておく、この焦点のずれの量は被検
査対象に応じて適宜に設定する。尚本実施例ではテレピ
ノ曹ツカメツ3及び4をそれぞれ薦1及び′i42のテ
レーピノ冒ンカメラとし九が、これらを入れ代えること
もできる。tた112図に示したようK、zs−フミラ
ー5で反射した被検査物品からの光を反射鏡を介するこ
となく直接嬉20テレピノ冒ンカメラ4に入射させるよ
うにしてもよい・ 第3図は本発明の方法を実施する装置の構成例を示した
もので、同図において7及び8はそれヤれ41及び第2
のテレビシーンカメラ3及び4から得られる第1及び第
2の映像信号gv、及びg、=のレベルを調節するレベ
ル調節器、9及びlOはレベル調節された第1及び第2
0映儂信号冨、1及び鳶、諺をそれぞれ増幅する増幅器
である。11は第1の比較器で、この比I!器は増幅a
9で増幅器れ九mlの映像信号E4を基準電圧発生福1
2から(1G) −ルドレペル゛罐圧Et1以上のときに「1」Kな9g
JlがEt1未満の場合に「0」になる51111fD
2値4生414から得られる第2のスレシ璽−ルドレベ
ルの蝋圧gl=とt比較して、第2の映像(1号ffi
、’s X>142のスレシ嘗−ルドレペル゛()E 
n1ts m上のときK「1」にな’)sE蟲がgtt
未満の場合にrOJになる42の2値化信号Ebsを出
力する。
Then, focus the lens of the first television camera 3 on the object to be inspected 2, and shift the focus of the lens of the 1112O television camera 4 from the object to be inspected. The amount of this focus shift is appropriately set depending on the object to be inspected. In this embodiment, the telepino cameras 3 and 4 are used as the telepino camera of recommendation 1 and 'i42, respectively, but these can also be replaced. As shown in Figure 112, the light from the inspected article reflected by the mirror 5 may be made to directly enter the camera 4 without passing through the reflecting mirror. This figure shows an example of the configuration of an apparatus for carrying out the method of the present invention, in which 7 and 8 are respectively 41 and 2.
Level adjusters 9 and lO adjust the levels of the first and second video signals gv and g,= obtained from the television scene cameras 3 and 4;
These are amplifiers that amplify the 0, 1, and 2 signals. 11 is the first comparator, and this ratio I! The instrument is amplification a
9, the amplifier generates a reference voltage for the 9 ml video signal E4.
2 to (1G) - 9g that is "1" K when the pressure is over Et1
51111fD which becomes "0" when Jl is less than Et1
The second threshold level wax pressure gl= obtained from the binary 4 raw 414 is compared with t, and the second image (No. 1 ffi
,'s X > 142 thread dropper ()E
n1ts When above m, K becomes 1') sE insect is gtt
42 binarized signals Ebs which become rOJ when the value is less than 42 are output.

15は4112)2値化傭号と71912の2直化信号
との差をとうてその絶対tll[音出力するエクスクル
−ジグオア1g1JlIIで、このエクスクル−ジノオ
ア回路15の出力v0は、第1及び第2の2値化信号[
bx及びgいが共に「0」または「1」のときにrOJ
になり、鳶b1及びgbsのいずれか一万が「1」で他
方が「0」のときに「1」になる。エクスクルーシゾオ
ア回415により、ft#−譬ルス消去回路が構成され
ている。
15 is an Excle-Jig-OR circuit 1g1JlII which takes the difference between the binary signal of 4112) and the binary signal of 71912 and outputs the absolute tll [sound, and the output v0 of this Excl-Jino-Or circuit 15 2 binary signal [
rOJ when bx and g are both “0” or “1”
becomes ``1'' when either 10,000 of b1 or gbs is ``1'' and the other is ``0''. The exclusion OR circuit 415 constitutes an ft#-error erasing circuit.

次に上記の装置l11を用いて行なう本発明の検査方法
を説明する。本実l/IA真では、先ず被検査物品2ピ
ノ冒ンカメラ3及び4で被検査物品2を同時に撮儂し、
焦点の合った第1の映像信号1cytと焦点のずれたj
l12の映am号Evlとを得る。この場合第1及び第
2のテレピノ曹ンカメラ3及び4は互いに同期させてお
く。次に嬉1及び第2の映像信号Icv1及びEv、の
レベルをfi4Ilして増@!9及び10により増幅し
、gs4図ム及びBK示すような第1及び第2の映像信
号1cvI及び1.1を得る。今砿検査物品の略中央部
に欠陥があるとすると、この欠陥は、第4図Aの映像信
号の略中央K例えば図示のような)fルス状N1Psと
して現われる。312のテレピノ曹ンカメラ4では物品
2tぼかして撮儂するため、$2の映倫信号鳶v冨には
欠陥部分がはっ自りと現われず、焦点の合り九41Ov
A像信号の・臂ルス状sp@のような特徴部分は現われ
ない。
Next, the inspection method of the present invention using the above-mentioned apparatus l11 will be explained. In this case, first, the object to be inspected 2 is photographed simultaneously with the Pino cameras 3 and 4,
In-focus first video signal 1cyt and out-of-focus first video signal j
Obtain the movie number Evl of l12. In this case, the first and second telephoto cameras 3 and 4 are synchronized with each other. Next, increase the levels of the first and second video signals Icv1 and Ev by fi4Il! 9 and 10 to obtain first and second video signals 1cvI and 1.1 as shown in the gs4 diagram and BK. If there is a defect at approximately the center of the inspected article, this defect appears as a loop-shaped N1Ps approximately at the center of the video signal in FIG. 4A (for example, as shown). Since the 312 telephoto camera 4 blurs the image of the object 2t, the defective part does not clearly appear in the $2 camera, and the focus is 941Ov.
Characteristic parts such as the lumbar sp@ of the A image signal do not appear.

次に41の映倫信号1evstJ11のスレシ冒−ルド
レペルEtiと比較して44図CK示すようKglの2
@化信号IJ1tを得、a12の映倫(f号Hvs t
 J2のスレシ璽−ルドレペル]Cts ト比11 し
てg4i1Dに示すように蘂2の2値化信号Ebsを得
る。ここでdXlのスレシ■−ルドレベルEt1は、特
徴を抽出するためのレベルでTo−)で、第1の2値化
信号に検出すべき特徴部分(この丙では欠11111s
分)を示すノ臂ルメ會含ませるように適当な値に設定す
る。本実施例では第1の2値化偏号icb、が・臂ルス
、;、、;及びPgから構成されているが、ここでPJ
は検出すぺ#i籍aS分を示すノタルス(本明細書では
これt−特徴)臂ルスという。)であり、Pl及びPl
′は検出すべ!特徴部分の背景の%*t−示す・9ルス
(本明細書ではこれを背景・中ルスという、)で6る。
Next, compare 41's Eirin Signal 1evstJ11's Threshold Drepel Eti with Kgl's 2 as shown in Figure 44CK.
Obtained @ conversion signal IJ1t, a12's Eirin (f number Hvs t
The threshold value of J2 is calculated by applying the [Cts] ratio 11 to obtain the binarized signal Ebs of the leg 2 as shown in g4i1D. Here, the threshold level Et1 of dXl is the level for extracting features (To-), and the feature portion to be detected in the first binarized signal (in this case, the missing 11111s
Set it to an appropriate value so that it includes the arm lume that indicates the number of minutes. In this embodiment, the first binarized partial code icb is composed of .
is called a notalus (in this specification, this is a t-feature) indicating the detected spec #i feature aS. ), Pl and Pl
′ should be detected! %*t of the background of the characteristic portion - 6.9 lus (in this specification, this is referred to as background/medium lus).

$2のスレシ璽−ルドレペルJs u、IXlの2値化
信号1cbt K含まれる背景・臂ルスP1′及びPl
と幅及び位相が同一な背景・ヤルスP1及びP;のみK
より嬉2の値化信号Eblを構成するように適当な値に
設定しておく。
$2 threshold Js u, IXl binarized signal 1cbt K included background/arms P1' and Pl
Background with the same width and phase as P1 and P; only K
An appropriate value is set so as to form a value signal Ebl with a higher value of 2.

次に上記のようにして得九第1及び第2の2値化償号I
8.及びgbsの差をとることにより背景ノ!ルスを消
去し、特徴ノ中ルスPJのみを瑣出す。本実施例ではエ
クスクル−シブオア回路15により2(13) 値化信号]1cbt及びIcbs O差の絶対値をとっ
て、背景・fルスt−消去し、特徴・譬ルスP、′から
なる検出信号E0を得ている。この・譬ルメPJは被検
査物品に検出すべ149徴部分(伺えば欠陥)が存在す
る場合にのみ現われるので、このノfルスP、′O有無
により被検査物品の要否の判定ヤ鐵別等を行なうことが
できる。
Next, as described above, the first and second binarized atonement symbols I are obtained.
8. By taking the difference between and gbs, the background no! Delete Lus and bring out only Luss PJ in its features. In this embodiment, the exclusive OR circuit 15 takes the absolute value of the difference between the 2 (13) converted signals] 1 cbt and Icbs O, and eliminates the background f and the detected signal consisting of the features P and '. Obtained E0. This PJ appears only when there are 149 detectable parts (defects, if you ask) in the inspected item, so whether or not the inspected item is necessary is determined based on the presence or absence of these nozzles P and 'O. etc. can be done.

尚第4図に示したli号波形は説明を藺単にするために
単純化したもので6−)で、実際の2値化償号は更に多
くの背景パルスを含むことがh9、検出すべき欠陥等が
2以上必る場合には2以上の籍値ノ譬ルスを含むことが
6る。
Note that the li waveform shown in Fig. 4 is simplified for ease of explanation (6-), and the actual binarization decoding includes many more background pulses, which should be detected. If there are two or more defects, two or more parables may be included.

このように、本発明の方法では、焦点をずらした!2の
映倫信号を作って、この$2の映像傭号スを消去するよ
うにしたので、基準−像との照合る。を九被検査物品の
映像信号の5&塩のみにより(14) 検査できるので、被検査物品のテレビシ璽ンカメラに対
する位置合せを厳密に行なう必要がない。
Thus, in the method of the present invention, the focus is shifted! I created a video signal of 2 and erased this $2 video signal, so I compared it with the reference image. (14) can be inspected using only the video signal of the article to be inspected (14), so there is no need to precisely align the article to be inspected with respect to the television screen camera.

上記の実施例では、2台のテレピノ璽ンカメラを用いて
、一方のカメラのレンズの焦点をfらすとしたが、両カ
メラのレンズの焦点は被検査物品に合せておき、一方の
カメラの撮像管に与える集束電圧を正規の電圧からずら
すことによって焦点のずれた第2の映像信号を得るよう
にしてもよい〇オ九このよう(電気的に焦点のずれ良信
号を得るようKし九場合には、1水平走査分の誤差を許
容すれば、以下に示すように1台のテレビジ璽ンカメラ
にけで本発明を実施できる。
In the above example, two telepino cameras were used, and the focus of the lens of one camera was set to f, but the focus of the lenses of both cameras was set to the object to be inspected, and the focus of the lens of one camera was set to f. It is also possible to obtain a second defocused video signal by shifting the focusing voltage applied to the image pickup tube from the normal voltage. In this case, if an error of one horizontal scan is allowed, the present invention can be implemented with just one television camera as shown below.

$51!ilは1台のテレピノ璽ンカメラにより本発明
を実施する場合に用いる装置の構成書を示したもので、
同図において2oはレンズの焦点を被検査物品に合せ九
テレピノ1ンヵメラ、21及び22は嬉l及び嬉2の比
較器、23及び24はヤれぞれsl及びslのスレン1
−ルドレベルノ電圧gt1および18tlを発生する基
準′成圧発生器で69、映像信号lcvは比較421.
及び22によりそれ−PtL第1及び第2のスレシl−
ルドレベルのt圧に相当する時間だけ遅延させる遅延回
路でめplこの遅延回路としては、超音波式、CCD式
、シフトレノスタ式、メモリ式等任意のものを用いるこ
とができる。26はエクスクル−7fオア回路で、その
人力1子には遅延回路25で遅延され九2値化信号gb
と2値化信号M8b′とが入力されている。
$51! il shows the configuration of the device used when implementing the present invention with one telepino camera,
In the same figure, 2o is a telepino 1 camera whose lens is focused on the object to be inspected, 21 and 22 are comparators for 1 and 2, and 23 and 24 are 1 and 1 cameras for sl and sl, respectively.
69, the video signal lcv is compared with 421.
and by 22 it-PtL first and second thread l-
This delay circuit delays by a time corresponding to the t-pressure at the field level. As this delay circuit, any one such as an ultrasonic type, a CCD type, a shift renostar type, a memory type, etc. can be used. 26 is an EXCLE-7f OR circuit, and its first input is delayed by a delay circuit 25 and receives a binary signal gb.
and a binary signal M8b' are input.

本実施例では第1及び#I2の比較器21及び22によ
り2値化回路が構成され、遅延回路25及びエクスクル
ーシゾオア回路26によn背景)譬ルス消去回路が構成
されている。
In this embodiment, the first and #I2 comparators 21 and 22 constitute a binarization circuit, and the delay circuit 25 and the exclusion OR circuit 26 constitute an error cancellation circuit.

27は集束電圧出力回路で、この例では高圧電fM 2
7 mとポテン7一メ一一27k及び27・とからな9
、テレビシ曹ンカメラから焦点の合り九嬉1の映像信号
を出力させる丸めに撮像管に与える必要のある4xo収
東電圧vl と、焦点のずれ九第2の映mf1号を出力
させる丸めに撮像管に与える42の収束電圧Vlとを出
力する。これらの集束電圧は切換wA路28七通してテ
レピノ璽ンカメラ20の撮儂1の集束電圧入力端子に印
加されている。切貞@略2sは、映像信号E1から同期
分−回路29全通して優良水平同期・ダルスPhKより
トリIされるプリ!!フク!!vJAm30の出力によ
り制御される。フリマグフc1ν!回路30は、水平同
期/4ルスが人力される毎に反転して「l」と「0」の
信号を交互に出力し、切換回路28は例えば「l」の信
号が入力されたと@IIC$10系束電圧v1を撮像管
に与え、「O」の信号が人力されたときにt42の集東
電fE V *を撮像管に与える。
27 is a focused voltage output circuit, in this example, a high voltage voltage fM 2
7 m and poten 7, 1, 1, 27 k and 27, tokarana 9
, the 4xo collecting voltage vl that needs to be applied to the image pickup tube to output the in-focus video signal 1 from the television camera, and the 4xo collecting voltage vl that needs to be applied to the image pickup tube to output the video signal of 9 out of focus 9, and the imaging to the round to output the 2nd video mf1 out of focus. 42 convergence voltage Vl to be applied to the tube. These focusing voltages are applied to the focusing voltage input terminal of the camera 1 of the telepino camera 20 through the switching wA path 28. Kirisada@approximately 2s is a synchronization portion from the video signal E1 through the entire circuit 29, and is pre-loaded by an excellent horizontal synchronizer/dulse PhK! ! Fuku! ! It is controlled by the output of vJAm30. Furimaguf c1ν! The circuit 30 inverts and alternately outputs "l" and "0" signals every time the horizontal synchronization/4 pulse is manually input, and the switching circuit 28 outputs signals of "l" and "0" alternately, for example, when the "l" signal is input @IIC$ A 10-series flux voltage v1 is applied to the image pickup tube, and when a signal of "O" is input manually, a Shutoden electric power fE V * of t42 is applied to the image pickup tube.

尚撮像管の集束方式としては、静電式、磁束式、及び両
者を併用した静電・磁束式がおるが、いずれの方式によ
る場合にも集束電圧出力回路に印加する電圧を変化させ
ることにより焦点の調整を行なうことができる。し九が
ってこの実施例で用いるテレビシ曹ンカメラはいずれの
形式のものでもよい、焦点をずらす丸めの第2の集束電
圧の大きさは被検査対象に応じて、ま九検出すべき%像
部分に応じて適当な1直に設定する。
The focusing methods of image pickup tubes include electrostatic type, magnetic flux type, and electrostatic/magnetic flux type that uses a combination of both. Focus can be adjusted. Therefore, the television camera used in this embodiment may be of any type, and the magnitude of the rounded second focusing voltage that shifts the focus may vary depending on the object to be inspected. Set to an appropriate 1st shift depending on the part.

(11) 次lC第6図A乃至Fを参照して、第5図の装置による
検査方法を説明する。46図ム及びBはそれぞれ水平同
期ノ臂ルスP、及び映像信号Ev(テレピノ嘗ンカメラ
の出力[号)の−ガを示している。
(11) Next, an inspection method using the apparatus shown in FIG. 5 will be explained with reference to FIGS. 6A to 6F. Figures 46 and 46 respectively show the horizontal synchronization pulse P and the video signal Ev (output number of the television camera).

前述のように1テレビシ冒ンカメラの撮像管の集束電圧
入力端子に印加される収束電圧は各水平走査毎に切換え
られるため、テレピノ■ンカメラ20から得られる映像
信号IAvKは、焦点の合つ九第1の映[1!号1cv
mと焦点のずれ九第2の映像信号Evlとが交互に現わ
れる。そこでこの映像信号E7を第1の比I11.滲2
1により時機抽出の丸めの嬉lのスレン1−ルドレペル
Et1と比較することにより、第6図Cに示すような2
値化信号Wbを得、更に映1gI号E。を第2の比較6
22により42のスレシ璽−ルドレベルgt=とルーす
ることにより、第6図りに示す主うな2値化信号6を得
る。2値化信号ちは、41の映倫信号g、iの2値化値
号である。41の2値化信号を1水平走査1111II
に含む信号であり、2111化信号Eb′は、第2の映
像信号Nvlの2値化信号でるるslの2il化値号を
1水平走(18) 嚢置自に含む信号である。次に2値化信号1b1gb信
号11.と2Im化信号gb/とをエクスクル−シブオ
ア回路26に人力する。これにより背量ノ臂ルメp @
’ r P s’を消去し、特徴14ルスPJのみを含
む検出信号鳶、を得る。尚116図Fはフリ、fフロジ
グ41113Gの出力信号管示している。
As mentioned above, the convergence voltage applied to the convergence voltage input terminal of the image pickup tube of the television camera 20 is switched for each horizontal scan, so the video signal IAvK obtained from the television camera 20 is 1's reflection [1! No. 1cv
m and the focus shift 9 second video signal Evl appear alternately. Therefore, this video signal E7 is converted to a first ratio I11. Blur 2
1, by comparing the rounding value of time extraction with Sren 1-Lepel Et1, we obtain 2 as shown in Figure 6C.
Obtain the digitized signal Wb and further output the signal 1gI No.E. The second comparison 6
22 to the threshold level gt=42, the main binary signal 6 shown in Figure 6 is obtained. The binarized signal is the binarized value number of the 41 Eirin signals g and i. 41 binarized signals in 1 horizontal scan 1111II
The 2111 signal Eb' is a signal containing the 2il conversion value of the second video signal Nvl in one horizontal scan (18). Next, the binary signal 1b1gb signal 11. and the 2Im signal gb/ are input to the exclusive OR circuit 26. As a result, the back volume of the arm p @
'rPs' is deleted to obtain a detection signal containing only the feature 14 PJ. Incidentally, Fig. 116F shows the output signal tube of Furi, f Frojig 41113G.

1III5図に示した実施例においては、嬉l及び第2
の比#111Kg1及び第2の映像信号を交互に含む信
号Nvを入力しているため、2011化信号Ebには、
Jllの映像信号gv、を第1のスレシ田−ルドレペル
Illと比較して2値化し九第1の2値化信号wbsの
他KJII2の映像信号g、sを第1のスレン1−ルド
Vベル14.と比較して2値化し良信号ちtが含まれる
。同様に2値化信号崎には、szowt像as鳶、雪ヲ
llI2のスレク冒−ルドレペル1Bと比較して2値化
した第2の2値化信号1:bsの他にgtの映像信号g
vlをs2のスレシ■−ルドレベルItlと比較して2
値化した信号1Cbtが含及びP′s・からな9、Eb
、は背景・豐ルスpi・l p、・と特徴パルスP、・
とからなるが、被検f備品によりては背景・譬ルスPl
Or PIO幅を七れぞれ背景ノヤルスP1・、P■の
@に等しくで亀ない場倉−考えられる。このような場合
には、第7図に示すように、テリピノ曹ンカメラ20と
第1及(182g)比較器21及び22との関に水平同
期ノ臂ルスPi、が入力される毎に切換え動作を行なう
分配回路31を設けて、映像信号Evに含まれるJll
の映像(71号g、u及び第2の映像信号z1をそれぞ
れ第1及び第2の比較器21及び22に分配するように
すればよい。この場合第1の比[421の出力111に
は焦点の合った#11の映像信号Ev、を嬉1のスレシ
冒−ルドレペルgttと比較して2値化したll&1の
2値化信号Eb1のみが得られ、g2o比収′a22の
出力側には焦点のず゛れた第2の映像信号Nvlを嬉2
0スレシ嘗−ルドレペルIctsと比較して211化し
良悪2の2値化信号Eb暑のみが得られる。
In the embodiment shown in Figure 1III5, the first and second
Since the signal Nv that alternately includes the ratio #111Kg1 and the second video signal is input, the 2011ized signal Eb has the following:
The video signal gv of KJII2 is compared with the first threshold level Ill and binarized, and in addition to the first binary signal wbs, the video signals g and s of KJII2 are compared with the first threshold level level Ill. 14. It is binarized compared to , and a good signal t is included. Similarly, in the binarized signal, a second binarized signal 1:BS is also included, as well as a video signal g of GT.
Compare vl with the threshold level Itl of s2
The converted signal 1Cbt contains and P′s・9, Eb
, is the background pulse pi・l p,・and the feature pulse P,・
However, depending on the equipment to be tested, the background
It is conceivable that the width of the PIO is equal to the @ of the background Noyals P1 and P■, respectively. In such a case, as shown in FIG. 7, a switching operation is performed every time the horizontal synchronization pulse Pi is input between the teripino camera 20 and the first (182g) comparators 21 and 22. A distribution circuit 31 is provided to perform Jll included in the video signal Ev.
The video (No. 71 g, u and the second video signal z1 may be distributed to the first and second comparators 21 and 22, respectively. In this case, the first ratio [421 output 111 is Comparing the in-focus video signal Ev of #11 with the 1st threshold drepel gtt, only the ll&1 binary signal Eb1 is obtained, and the output side of the g2o specific yield 'a22 is I am happy with the second video signal Nvl which is out of focus.
In comparison with 0 threshold level Icts, only the binary signal Eb of 211 and good/bad is obtained.

王妃の実tIIA例では、i41及び縞2のスレ7■−
ルドレペルを角なるレベルとしたが、小さな欠点を検出
する場合には、嬉1及び42のスレ:/#−ルドレ(ル
を等しくすることができる。この場合は48図に示した
ようにl濶の比較器21のみを設けてテレビジ曹ンカメ
ラ20から得られる映像信号をスレシ曹−ルドレペルE
tと比較するようにすればよい。
In the Queen's Fruit tIIA example, i41 and stripe 2 thread 7 -
When detecting a small defect, it is possible to make the levels of 1 and 42 equal. In this case, as shown in Figure 48, Only a comparator 21 is provided to convert the video signal obtained from the television camera 20 into a digital camera.
What is necessary is to compare it with t.

以上のように、本発明の方法及び装置によれば、被検査
物品をテレビywンカメラで撮儂して、焦点の合った儂
と焦点のずれた像の映像信号を得、両映像信号と2値化
して差をとることにより特徴−分の背景を構わず信号t
−消去するようにし九ので、基準−像との照合を行なう
ことなく瞬時に検査を行なうことがで龜る利点がある。
As described above, according to the method and apparatus of the present invention, an object to be inspected is photographed by a television camera to obtain video signals of an in-focus image and an out-of-focus image, and both video signals and two images are obtained. By converting it into values and taking the difference, the signal t can be obtained regardless of the background of the feature-min.
- Since the image is erased, there is an advantage that inspection can be carried out instantaneously without comparison with a reference image.

また被検査物品のテレピノ冒ンカメラに対する位置合せ
を厳密に行なう必要がないので実施が容易で69、生産
ラインKm)け4IIlI1品の検査等を容易且つ正確
に行なうことができる。更に大谷瀘の記憶装置中複雑な
演s装置を必要としな匹ので、装置のコスト會引下げる
ことができる。
Further, since it is not necessary to precisely align the inspected article with respect to the telephoto camera, it is easy to carry out the inspection, and inspection of one article on a production line Km) can be carried out easily and accurately. Furthermore, since Otani's storage device does not require a complicated processing device, the cost of the device can be reduced.

(21)(21)

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び嬉2図はそれぞれ2台のテレピノ■ンカメラ
を用いて本発明を実施する場合のカメラの配置と光学系
の構成の異なるfIiIl′に示した説明図、43図は
本@明の方法を実施する装置の構成偽を示すプロ、り図
、第4図人乃!Iは第3図の各部の信号波形を示す線図
、lX5図、47図及び嬉8図はそれぞれ本発明の方法
を実施する装置の異なる構成書を示すゾロ豐り図、#I
6図ム乃至FFi嬉5図の各部の信号波形を示す線図で
ある。 2・・・被検査物品、3.4.20・・・テレビジ曹ン
カメラ、5・・・ハーフミラ−111,13,21゜2
2・・・比較器、15.26・・・エクスクル−ジノオ
ア回路、25・・・遅延回路、27・・・県東電圧出力
−路、28・・・切lA1gl痛。 (22) 第5図 第6図 (F):
Figures 1 and 2 are explanatory diagrams showing different camera arrangements and optical system configurations when the present invention is implemented using two telephoto cameras, respectively, and Figure 43 is an illustration of the book A professional diagram showing the configuration of the apparatus for carrying out the method, Figure 4 Hitino! I is a diagram showing the signal waveforms of each part in FIG.
FIG. 6 is a diagram showing signal waveforms at various parts of FIGS. 6 to 5. FIG. 2... Article to be inspected, 3.4.20... Television camera, 5... Half mirror 111, 13, 21°2
2... Comparator, 15.26... Exclusio-OR circuit, 25... Delay circuit, 27... Kento voltage output-route, 28... Cut lA1gl pain. (22) Figure 5 Figure 6 (F):

Claims (1)

【特許請求の範囲】 (1)  被検査物品の外観中形状を自動検査する物品
の自動検査方法において、藺紀被検査物品をテレピノ璽
ンカメラで撮像して焦点の合った第1の映像信号と焦点
のずれた第2の映倫信号とを得る過橿と、鍵紀嬉lの映
像信号を特徴抽出のための#$1のスレシ冒−ルドレペ
ルと比較することKより2値化して特徴部分を表わす特
徴・譬ルスと該特徴部分の背景を表わす背景・苛ルスと
を含む第1の2瀘化信号を得る通椙と、鏑妃嬉2の映像
信号をs2のスレシ■−ルドレベルと比較することKよ
り藺紀嬉1の2値化信号に含まれる背景・臂ルスと同−
幅同一位槽O背景Δルスからなる蘂2の2値化信号を得
る過橿と、鍵起嬉lの2値化信号と第2の2値化慣号と
の差をとって背景・量ルスを消去する過楊と1行なうこ
とt4#黴とする物品の自動検査方法。 (2)  繍起テレピノ曹ンカメラとして41のテレピ
ノ璽ンカメラと第2のテレピノW/カメラとの2台を設
け、前記第1のテレピノ冒ンカメラで前記第1の映倫信
号を得、前記第2のテレピノ■ンカメラで前記s2の映
倫信号を得る特許請求の範囲第1項に1載の物品の自動
検査方法。 (3)  前記テレピノ曽ンカメラf:1台だけ設け、
鋏テレピノ■ンカメラの撮像管の集束電極に与える電圧
を1水平走査毎に変化させることにより前記第1の映像
信号とJi2の映倫信号とを交互に得る特許請求の範囲
第1項に紀−の物品の自動検査方法。 (4)  mealのスレシ璽−ルドレベルト嬉20ス
レシ冒−ルドレベルは等しく設定されている特iff請
求の4141jJ乃至第3項のiずれかlりに紀−のw
品の自動検査方法。 (5)  被検査物品の外−中形状を自動検査する一品
の自−検査装置において、sI記記構検査物品撮像して
焦点の合り九41の映像信号を出力する慕lのテレピノ
曹ンカメラと、−1被検査物品を撮像して焦点のずれ九
第20味儂儂号を出力するaI2のテレピノ冒ンカメラ
と、−1縞l及び−2のテレピノ1ンカメラのレンズと
前記被検査物品との+sll K fi!、置されて鍵
紀被検査物品からの光の−S會m起第1のテレビシ■ン
カメラに入射させ一5tIil記第2のテレビシ1ンカ
メラに入射させるハーフ1ラーと、鍵&!41のテレピ
ノ1ンカメラから得られ九嬉lの映像信号を41のスレ
シw−ルビレベルと比較して特徴部分子:衆わす41黴
ノ譬ルスと背景部分を表わす背景、4ルスとを會むjI
lの2値化信号會出力する第1の比較器と、前記第20
テレビゾーンカメラから得られるJ2の映像信号を42
のスレ7m−ルドレベルと比較してIiI起嬉lの2値
化信号に含まれる背景ノ量ルスと同−幅同一位橿の背景
パルスからなるs2の2値化信号を出力すhs2の比較
−と、m紀嬉1及び嬉2の比*aO出力儒号の纏をと9
て4紀背景ノ量ルスを消去すhxaΔルス消去回路とを
^瘤し、前記第1、&びjll!Oテレビシ冒ンカメラ
ンカメラーフ(ラーを含む光学系を通して一紀被検査壽
品七角じ角度から撮儂することを4I値とする物品の自
動検査装置。 l @ \ 品の自動検査装置におりて、前記被検査物品にレン<0
焦点が合されたテレビシ1ンカメラと、繭重テレビノー
ンカメラから焦点の合り九嬉1の映像信号を出力させる
丸めK1m記テレVゾ■ンカメラの撮儂管O集束電、甑
に印加する$10集東電圧と前記テレビシ■ンカメラか
ら焦点のずれた縞3の映#I償号を出力させる九めに@
記撮儂管に与え、6JI2の集束電圧とを出力する集束
電圧出力回踏と、前記テレピノ雪ンカメラの出力から分
離した水平同期・ぐルスを入力として各水平同期/ll
スス人力される毎KM&!第10集東電圧及び嬉20集
束電圧を切換えて前記撮儂管に与える集束電圧切換回路
と、前記テレビシ冒ンカメラの出力信号に含まれるm起
@1(D映像信号を2値化して特徴部分を表わす特徴パ
ルスと#特徴部分の背景を表わす背景/ぐルスとを含む
第102値化信号を発生させ且つ前記f12o映像信号
を2値化して前記第lの2値化i号に含まれる背景パル
スと同一幅同一位相の背景/豐ルスを発生させる2値化
回路と、繭重l11の2値化信号と42の2値化信号と
の差をとって背景〕臂ルスを消去する背景ノダルス消去
回路とを典備してなる物品の自動検査装置。 (7)  ellt、2値化1J1jlIは、鍵紀テレ
ピノ曽ンカメラの出力信号をスレン1−ルドレベルと比
較する比ll!−からな)、111起背景ノ9ルス消去
關踏は前記比Il!−の出力を1水平走査に相尚する時
間だけ遷延させbjI延m路と諌遍嬌U路の出力及び前
記比aSの出力を入力とするエタスクルーシ!オア回路
とからfk5でiる411軒請求の@1嬉6項に紀鎮の
物品O自動検査装置。 (s)  鋳起2値化回踏は、鍵紀テレビシ審ンカメラ
の出力信号なillのスレン1−ルドレベルと比較する
嬉lO比I2mと*配出力信号を第2のスレシーールド
レベルと比較する箒20比*aとからなp、−紀背景・
臂ルス消去回路は前記41及び第xojt*tao一方
の出力を1水平走査に椙尚する時間だけ遷延させる遷延
amとI/II紀嬉l及び嬉20比I!湯の他方の出力
とi*ffi遍嬌回−路の出力とを人カドするエタスク
ルーシtオア回路とからなり(1) ている籍許請求の範囲第6鷹に記載の物品の自動検査装
置。 (9)  前記2値化圏路は、入力信号をIIIのスレ
シ冒−ルドレベルと比較する第1の比較量と、入力信号
をls2のスレf/M−ルドレベルと比較するa12の
比較器と*起テシビノlンカメラの出力信号に交互に現
われる第1の映像信号及び嬉20映倫信号をそれぞれ前
記第1の比I!器及びs20比12mに分配する分配回
路とからな)、酋記背量/々ルス消去回路は前記第1及
び11120比穢器の一方の出力をl水平走査に相尚す
る時間だけ遷延させる遷延回路と前記第1及び第20比
較遥の他方の出力と#紀週嬌瞥路の出力とを入力とする
エクスクルーシゾオア回路とからなりている特許請求の
範1!I第6JJK紀載の物品の自動検査装置。
[Claims] (1) In an automatic inspection method for an article that automatically inspects the appearance and shape of the article to be inspected, the article to be inspected is imaged by a telescope camera and a first video signal in focus is generated. Obtaining the second out-of-focus video signal and comparing the video signal of Kagaki Kiri with the #$1 threshold for feature extraction. Compare the video signals of Tongsu and Kaburahiki 2 with the threshold level of s2 to obtain the first two-wave signal including the characteristic/character representing the characteristic portion and the background/character representing the background of the characteristic portion. The background included in the binarized signal of Aikirei 1 from KotoK is the same as the arm Rus.
To obtain the binarized signal of the second layer consisting of the width-identical tank O background Δrus, and to calculate the background and quantity by taking the difference between the binarized signal of the key and the second binarized signal. A method for automatically inspecting moldy articles with one step: t4# to eliminate mold. (2) Two sets of 41 telepino camera and a second telepino W/camera are provided as a telepino camera, and the first telepino camera obtains the first video signal, and the second telepino camera obtains the first video signal. The method for automatically inspecting an article as set forth in claim 1, wherein the video signal of s2 is obtained using a telepin camera. (3) The telepino camera f: only one is provided,
Claim 1 provides that the first video signal and the Ji2 video signal are obtained alternately by changing the voltage applied to the focusing electrode of the image pickup tube of the scissors telepin camera every horizontal scan. Automatic inspection method for goods. (4) Meal's threshold level is 20. Threshold level is set equally.
Automatic product inspection method. (5) In a self-inspection device that automatically inspects the outside and inside shapes of objects to be inspected, a telescope camera that captures an image of the object to be inspected and outputs a focused 941 video signal. , a telepino camera of aI2 which takes an image of the -1 inspected article and outputs a focus shift 9 No. 20, a lens of the telepino camera of -1 stripes l and -2, and the said inspected article. +sll K fi! , the key is placed so that the light from the item to be inspected is incident on the first television scene camera and the key is incident on the second television scene camera, and the key &! Comparing the video signal of 90 degrees obtained from the 41 telepino camera with the 41 thread w-ruby level, the characteristic part molecule: The 41 mold parable and the background representing the background part, 4 Lus are met.
a first comparator outputting a binary signal of 1;
The video signal of J2 obtained from the TV zone camera is 42
Comparison of hs2 to output a binarized signal of s2 consisting of a background pulse with the same width as the background pulse included in the binarized signal of IiI Kirei I compared with the thread level of 7m - And the ratio of mkirei 1 and rei 2 *aO output Confucian number's jacket and 9
The hxaΔ las elimination circuit that erases the quaternary background quantity lus is used, and the first, & jll! An automatic inspection device for articles whose 4I value is to take pictures of the inspected article from hexagonal angles through an optical system that includes a camera. Then, the inspected article has a len<0
The focused TV zone camera and the focused TV zone camera output the focused video signal from the focused TV zone camera. In the 9th episode, output the out-of-focus stripe 3 image #I compensation code from the 10th collection of Tokyo Voltage and the TV scene camera.
A focused voltage output circuit that outputs a focused voltage of 6JI2 to the recording tube, and a horizontal synchronization signal separated from the output of the telepino camera as input to each horizontal synchronization/ll.
Every KM&! A focusing voltage switching circuit that switches between the 10th focusing voltage and the 20th focusing voltage and applies it to the camera tube, A 102-valued signal including a characteristic pulse representing a characteristic pulse and a background/gurus representing the background of the #characteristic portion is generated, and the f12o video signal is binarized to generate a background included in the l-th binarized i number. A binarization circuit that generates a background pulse with the same width and the same phase as the pulse, and a background nodules that eliminates the background pulse by taking the difference between the binarized signal of cocoon weight l11 and the binarized signal of 42. (7) ELLT, binarization 1J1JlI is a comparison of the output signal of the key telepino camera with the threshold level. The background of 111's 9th erasure is compared to the above! -, the output of - is delayed for a time equivalent to one horizontal scan, and the outputs of the bjI extension m path, the output of the ibengo U path, and the output of the ratio aS are input. From the OR circuit to fk5, 411 claims are made @1Ki6 is Kizhen's automatic inspection device for goods. (s) In the binary conversion circuit, the output signal of the TV screen camera is compared with the ill's shield level, and the output signal is compared with the second shield level. Broom 20 ratio *a and karana p, -ki background・
The arm erase circuit delays the output of the 41st and xojt*tao by the time required for one horizontal scan. (1) An automatic inspection device for articles as set forth in claim 6, which comprises an eta crucito or circuit that interdigitates the output of the other side of the hot water and the output of the i*ffi circuit. (9) The binarization circuit includes a first comparison amount that compares the input signal with the threshold level of III, a comparator of a12 that compares the input signal with the threshold level of ls2, and * The first video signal and the 20 video signal that alternately appear in the output signal of the digital camera are respectively compared to the first ratio I! and a distribution circuit for distributing the signal to a s20 ratio of 12m), and a pulse canceling circuit for delaying the output of one of the first and 11120 filters for a time equivalent to a horizontal scan. Claim 1 comprising: a circuit; and an exclusive or circuit which receives as input the other output of the first and 20th comparison circuits and the output of the #Kiyutsukabetsuro! Automatic inspection equipment for articles listed in I No. 6 JJK Journal.
JP1247582A 1982-01-28 1982-01-28 Method and device for inspecting articles automatically Granted JPS58129205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1247582A JPS58129205A (en) 1982-01-28 1982-01-28 Method and device for inspecting articles automatically

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1247582A JPS58129205A (en) 1982-01-28 1982-01-28 Method and device for inspecting articles automatically

Publications (2)

Publication Number Publication Date
JPS58129205A true JPS58129205A (en) 1983-08-02
JPS6332123B2 JPS6332123B2 (en) 1988-06-28

Family

ID=11806398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1247582A Granted JPS58129205A (en) 1982-01-28 1982-01-28 Method and device for inspecting articles automatically

Country Status (1)

Country Link
JP (1) JPS58129205A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107504A (en) * 1983-11-16 1985-06-13 Amada Co Ltd Discriminating device for secondary surface shape
FR2702558A1 (en) * 1993-03-11 1994-09-16 British Nuclear Fuels Plc Method for measuring the linear dimension of an object

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491280A (en) * 1972-04-14 1974-01-08
JPS4997648A (en) * 1973-01-18 1974-09-14

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491280A (en) * 1972-04-14 1974-01-08
JPS4997648A (en) * 1973-01-18 1974-09-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107504A (en) * 1983-11-16 1985-06-13 Amada Co Ltd Discriminating device for secondary surface shape
FR2702558A1 (en) * 1993-03-11 1994-09-16 British Nuclear Fuels Plc Method for measuring the linear dimension of an object

Also Published As

Publication number Publication date
JPS6332123B2 (en) 1988-06-28

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