JPS58127904A - Equipment for producing translation movement in first and second directions - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Providing planar motion of objects in one or more directions is highly desirable in many technical fields. Translating an object in first and second orthogonal directions without causing it to deviate from its plane of motion has been found to have utility in the field of optics.

In this case, very precise fine adjustment of the lens relative to other lenses or mirrors is required in the optical system parallel to and/or perpendicular to the optical axis or other related objects.

According to the present invention, a device that satisfies the above requirements has been obtained.

The device according to the invention consists of a structure formed by a platform fixed to a base and two other platforms that are movable with respect to the platform fixed to the base. The two movable platforms are arranged in a row relative to each other and to a platform fixed to the base. A flexible member connects the two movable platforms to each other, allowing movement of one of the two movable platforms in only a first direction relative to the fixed platform.

Furthermore, a platform fixed to the base;
A flexible member is provided connecting the other of the two movable platforms, and the flexible member moves the two movable platforms in a second direction orthogonal to the first direction. It is designed to let you do so. The first and second directions of movement occur in a single plane. A mechanical part fixed to the platform is provided, the mechanical part moving one of the two movable platforms in the first direction and the two movable platforms in the second direction. It is designed to make slight movements selectively.

Next, the configuration of the present invention will be specifically explained with reference to the embodiments shown in the drawings.

The structure 10 shown in FIG.
It is made up of 2,13. Platforms 11.13 of these 7 ohms are connected by flexible members 14, 15, 16.
The platform 12.13 is a flexible member 18.
19. Each flexible member 14
．． 15, 16, 17, 18, and 19 are flexible in the thickness direction but rigid in the length and width directions. This allows the platform 7 ohm 11 to be movable relative to the platform 12 in two orthogonal directions. The platform 12 is fixed at the base, i.e. in relation to its working area. Flexible member 14°15.1
6.17 is rigid with respect to the Y direction indicated by the X, Y, Z coordinate system, so that the platform 11 or 13
When the platform 13 or 11 moves in the Y direction, the platform 13 or 11 also moves in the Y direction. Also, flexible member 1
8゜19 replaces platform 13 with platform 1
2 in the Y direction, the platforms 11 and 13 move in the Y direction with respect to the flexible members 14, 15, 16 .
17, so that platform 11 is moved in the Y direction with platform 13 when this platform 13 moves in the Y direction. Similarly, when platform 11 moves in the Y direction, platform 13 is also moved in the Y direction. The flexible members 14, 15.degree. 16.17 permit movement of the platform 11 in the X direction shown in the coordinate system of FIG. A fixed platform 12 is arranged between movable platforms 11 and 13.

Platforms 11, 12, and 13 need to be arranged approximately in parallel above and below each other, so platform 1
2 length and width dimensions of platforms 11 and 13
The length and width dimensions are also somewhat large. With this configuration, flexible members 14, 15, 16.
Openings 20, 21, 22, 23, respectively, can be formed through which 17 passes. The openings 20° 21.22, 23 which allow the platforms 11.13 to be aligned exactly
It is of sufficient size to allow movement of the flexible member 14° 15, 16, 17 to the desired extent in the desired direction.

A flexible member 18 , 19 connected at one end to platform 13 has an opening 24 in platform 12 ,
Pass through 25! This funki pull member 18.19
The other end is fixed to the platform 12 via a block. The block itself is fixed to or integrated into the platform 12. The ends of the flexible members are secured to each platform in any convenient manner.

The object to be moved is attached to a platform 11. For example, the object to be moved is one of the rigid shells (Strong Shθ11) in an optical system published under the title "Method and Apparatus for Adjusting Optical Systems". In such optical systems, the lens shear /L/(
It is highly desirable to be able to finely adjust the position of the meniscus 5hell with respect to the position of other parts of the optical system.

It is possible to change the arrangement of the platforms 11, 12, 13. According to the variant embodiment of FIG. 6, platform 13 is arranged between platforms 11 and 12. The mode of action and the first
The mode of action according to the arrangement shown in the figure is completely the same.

In FIG. 2, a mechanism is shown for imparting fine movements to the platform 11 in the X and Y directions. This mechanism is mounted on the top surface of platform 13 in FIG. The shaft 26 moves the platform 11 in the X direction, whereas the shaft 27 moves the platform 13 and with it the platform 11 in the Y direction.

The shaft 26 has an externally threaded section, which is connected to a block 29 fixed to the platform 13.
It engages an internally threaded section formed in hole 28 of.

The end portion 30 of the shaft 26 is formed with a male thread that engages with a female thread formed in a hole 31 of the arm 32 of the bell crank 33. The bell crank 33 is pivotally attached to the platform 13 at a pivot axis 54 . The arm 35 has a notch 36, and this notch 3
Since one end of the link device 37 is fixed to the link device 6 and the other end of the link device 37 is fixed to the platform resistor 11, when the shaft 26 is rotated, the engaging screws are rotated as described below. Since the thread pitches are different, the platform 11 moves in the X direction.

The bell crank 33 is connected at position 38 to a spring 39 which is connected to a member 40 fixed to the bottom of the platform 12.

Spring 39 is attached to pivot axis 54 and shafts 26 and 27.
Provides force to remove gaps created by threaded connections at the ends of the

The linkage 37 is constructed with a slight flexibility to accommodate the angular movement exerted by the bellcrank 33.

The pitch of the thread formed in the hole 2B of the block 29, the pitch of the thread formed in the hole 31 of the arm 32, and the joint of the thread of the corresponding threaded section of the shaft 26 are different from each other. , the ratio is, for example, 40:44.4
This imparts a slight movement to the platform 11 in the X direction in a known manner.

The shaft 26 has connecting members 41 , 42 each spanning a short necked-down section (not shown) of the shaft 26 . This necked-down section maintains the necessary stiffness in the axial direction while making the shaft 26 relatively flexible in the angular direction. With this, bellcrank 3
Compatible with 3 turning movements. The connecting members 41,42 are manufactured by, for example, Rexnora Co, in Warren.

The same small flexible disc by Pa has the stiffness to untwist the shaft 26 in the neck down section.

The shaft 27 has an externally threaded section that engages an internally threaded section formed in a hole 43 in a block 44 fixed to the bottom of the stationary platform 12.

The end 45 of the shaft 27 also has an externally threaded section which engages an internally threaded section formed in a hole 46 in a block 47 fixed to the platform 13.

The pitch of the thread formed in the hole 43 of the block 44, the joint of the thread formed in the hole 46 of the block 47, and the pitch of the thread of the thread section of the shaft 27 corresponding thereto are the same as those of the hole 2B. Similar to the ratio of pitches in the threads with 31, 40
: The ratio is 44.4. The shirt 27 also has two neck-down points, and connecting members 48 and 49 are provided across these neck-down points. The mode of operation of this connecting element 48, 49 is similar to that of the aforementioned connecting element 41, 42.

Due to one complete rotation of the shaft 26 or 27: The total amount of movement of the brat form 11 in the X or Y direction is determined by the difference between the threaded edge at one end of the shaft and the threaded edge at the other end of the shaft. stipulated. For example, if the pitch ratio is 40:44.4, the respective pitches are 0.0225 inch and 0.0255 inch.

The difference between these torsions provides 0.0025 inches of fine movement per revolution of each shaft.

According to the invention, a device has been obtained which allows a platform and an object mounted on it to be finely adjusted to a predetermined degree in two orthogonal directions on a single plane.

The invention is not limited only to the illustrated embodiments.

[Brief explanation of the drawing]

1 is a perspective view of a first embodiment of the device according to the invention; FIG.
The figures show a top view of the mechanism for imparting motion to the device according to FIG. 1, and FIG. 6 is a perspective view of a second embodiment of the device according to the invention. 10...Structure, 11,12.13...Platform, 14,15.16.17,18.19...Flexible member, 20,21,22.23.24.25
...Opening, 26.27...Shaft, 28...
Hole, 29...Block, 30...End, 31...
Hole, 32...Arm, 33...Belcran Hisyu 35.
...Arm, 36...Notch, 37...Link device, 38...Symbol, 39...Spring, 40...
Member, 41.42... Connecting member, 43.46... Hole, 45... End, 44, 47... Block, 48,
49...Connecting member, 54...Swivel axis

Claims (1)

Claims: 1. A device for producing a translational movement in a first and a second direction, comprising a plurality of platforms, wherein a member connecting the plurality of platforms to each other comprises one of the plurality of platforms; A device for producing translational movements in a first and a second direction, characterized in that it is adapted to cause only one to move in orthogonal first and second directions. 2. The plurality of platforms are comprised of first, second, and sixth platforms arranged above and below each other in substantially one row, and the second platform among the six platforms is the first platform. 6. The device of claim 1, wherein the device is fixed in relation to the platform and the sixth platform. 5. A plurality of first flexible pull members connecting the first and third platforms are adapted to move the first platform only in the first direction; 3. The apparatus of claim 2, wherein a plurality of second flexure pull members connecting the platforms allow movement of the first and second platforms only in the second direction. 4. The apparatus of claim 6, wherein the second platform is located between the first platform and the sixth platform. 5. The apparatus of claim 4, wherein the second platform has an opening extending through the first flexible pull member. 68. The apparatus of claim 4, wherein the sixth platform is located between the first and second platforms. 2. A mechanical part is provided for selectively moving the first platform in the first and second directions, the mechanical part moving the first platform and the second platform in the first and second directions. a first shaft connected between the second platform and a sixth platform for movement in a second direction; and a first shaft for movement of the first platform in the first direction. 6. The apparatus of claim 5, further comprising a second shaft connected between the first platform and the sixth platform. 8. The first shaft and the second shaft are differential screws that cause rotation of the first shaft or the second shaft to move the first platform in the first direction or the second direction. 8. The device according to claim 7, having: 9, wherein the second shaft has a bell crank connected to the first platform for converting the linear motion of the second shaft into a linear motion orthogonal to the linear motion. An apparatus according to claim 7. 10. The apparatus of claim 7, wherein the first and second shafts each have a member for correcting the inclination of the two shafts.