JPS58124902A - Triaxial displacement detector - Google Patents

Abstract

PURPOSE:To make construction simple and stability in the neutral stage high by mounting a measuring element to a swivel of a 3-point support system, and detecting displacements in triaxial directions independently of respective axes. CONSTITUTION:A slider 21 which slides axially is provided in a body 20 of a hollow cylindrical shape. A steel ball 23 stuck in the bottom end part is fitted into the recess 26 of a swivel 24. A measuring element 27 is fixed below the swivel 24 which is supported by three pieces of positioning balls 25. Further, a Z-axis displacement detector 28 is mounted in the central part on the top surface of a body 20, and X-axis 29, Y-axis displacement detectors are mounted in the flange part of the slider 21 to detect the displacements of the measuring element. Thus, the detector of the simple construction having good stability in the neutral stage is obtained.

Description

[Detailed description of the invention] The invention is based on three-dimensional shapes and three-dimensional shapes used for measurement.
It is related to

Conventional displacement filters have been developed and put into practical use, including electric microphones (1) and 41-ball meters. These detectors are designed to detect displacement jt and t''R of only one axis in the 16L61111 direction.

On the other hand, in order to detect the entire mass of two axes, or:
Therefore, there are currently very few examples of three-axis A-position detectors being used, and they are not suitable for research purposes. It is only a prototype for ``.''.

Figure 1 and Figure v12 are two-axes that have been tested in the past.
This is a drawing showing an example of the detector, and 1f shown in this figure.
IIt rice cooker, shaft (2) integrally formed with measuring rod (fl)
The container is housed in the main body (4) via the guide steel ball (3) so as to be slidable in the X-axis direction and the Y-axis direction, and this 1lI
Due to the action of the coil spring (5) that pulls the li1121, it is positioned at the center of the main body (4) when no load is applied.

When the A electron (1) touches the object and moves in the x direction or in the Y axis direction against the elastic force of the lever (6), this - When the jk and te are detected in contact with the shaft (2) (6) or (7), there is only one output.

However, the above-mentioned 7D construction had many drawbacks, such as unstable characteristics of the probe fl when it returned to the zero point '\ after hyperactivity, and a large error in determination. Furthermore, in this 4-stroke,
The problem of not being able to detect two axes of φ cutting and λ in the axial direction and the X-axis direction was also encountered.

The present invention is based on the above-mentioned block method, and provides a 311III medium bloomer which has a mass-rate structure and can detect displacement in three axial directions independently of the valley width.The details of the present invention are as follows. The following is a description of the embodiment shown in the drawings.

Three funeral pictures and! ! The IJV diagram is an analytical view showing four parts of the triaxial positioning device according to the present invention. In the figure (4 is the main body of the displacement detector with a circular shape in the center, and 20 is the entire inside of the main body (20a).
), and this slider is used to strain the steel body so that it is sliced into thin layers in the axial direction. 14 is a slider, and a compressed coil I presses against the zi+fl' mo. "Rebane," is the lower part of the song "Slike".
I hit the ball with the ball IJ, and the ball is trying to bottom out with the 4th part of the fast Suipe Shoj (1). 2(0)), the sorrel tree is supported at the bottom of the wooden candle by one positioning standard, and the central part of the lower surface of the sorrel tree candle has the above-mentioned A recess with a V-shaped cross section that merges with the steel ball (4) is provided. Also, in the f direction of the sorrel I, there is a recess in the Y axis, the Y axis, and the The measuring tip for detecting the 1d is correct.-The zm tip detector for detecting the displacement in the zIIIi11 direction is installed in the center of the upper surface of the main body (0), and the 4th (row is , the 7th X-axis displacement detector and YIII, which detect the first position in the X-axis direction, are accommodated in the 7th flange part (21a) of the slider 1).
The Y-axis and Y-axis displacement selection exhibition 2
Team, IL7 and kK6 in the center of both and slider 2υ
Place IIX+t on slider z6 so that the two lines intersect at right angles. Then the above z! The probe of the X1lI[l
The I skin Y-axis A position detector 29j and the paulownia measuring head must be brought into contact with the swivel I relay through the steel balls 1311Gl111. A case will be described in which the measuring wire of a three-axis displacement detector has a displacement in the semi-forward direction, for example, from the X-axis direction by -1. That is, when a displacement is applied to the measuring tip 127) in the X-axis direction, the measuring tip 27)
1's 1st place gives rise to Sorrel Shi1L41 V'i stubborn month. However, concave = 1 < (7
1: Because it is connected to the ball ``1'' fixed at the center of the lower surface of the slider ZU, the center of the steel ball ``:'' is used as the full fulcrum and the rocking movement is performed. '4
Due to the downward force of the sentence slider February, the jth
As shown in the figure? The number of pieces is decided by using the touch that connects the 21st ball as the fulcrum, and the ball is scooped up by the slider 711's wJ, Vc, and changes to 1 and the master in the upper half of the first round.
It is detected by the X-axis quality calculator -υ) as the mountain and river summer with 1. Father's theory (7) Suyo
) YII11111 direction displacement can also be detected in the same way as above by using the Y, J position adjuster and knob provided at the corner.

In addition, when the measuring head +271 is displaced in the manual direction, 1
,? When the positioning balls (25a) (25b) (25o) are written on the same plane as shown in the fJ1 diagram, %
Assuming that the displacement in the four directions is as shown in Fig. 5, the positioning balls (25a) (25D) are connected by
As a result, the A ball is pushed upward. On the other hand, measuring head 2
7) is displaced on the old ml bisector of the straight line AB, and while the input source is only the displacement in the X-axis direction, the output of the displacement detector is not only the X-axis displacement but also the Y-axis direction. , the Y-axis displacement will also appear. While doing these Y
The extra 1st position detection violet on the axis and Y axis (generally referred to as mutual interference) is detected by a measurement circuit consisting of a data processing device (W!r1) and a magnetic reticle flexor as shown in Fig. 2. .I41
It can be easily removed by using purple.

Next, a case where the measuring tip is displaced in the axial direction (zllIIf position) will be explained. That is, when the measuring head g71 reaches the same axial position, the measuring head μ7j moves to the position directly above (f) as shown in Fig. The slider song that is in contact with the song is also on top of the Meido. Therefore, if the displacement of the slider song and the 2nd position are detected by the phantom, the 1st time will be used.

As explained above, the three-axis first position detector according to the present invention is
Since the displacements of the three axes of x11II%YIIIIII%z-axis are individually measured using one measuring element, the displacement of J pongee can be easily determined from Jf and A. Also, the three-axis positioning device kept by Mitsuaki is the Sorrel I with all the probes attached.
Since it is supported using a three-point support system, stability when in neutral is also greatly improved.

[Brief explanation of drawings]

Figures 5 and 5 are cross-sectional views showing seven examples of conventional x-position detectors; The y6Z diagram and the value <1' are a schematic diagram showing the foreshadowing when the measuring element of the 31lill quality detection according to the present invention is displaced, and FIG. () Main body, 21)...Slider, μ...Pressed carp I lever spring, (2)...Steel ball, e.g. Sorrel I, Shin...
ePositioning ball, key...concavity, g71...measuring head, positive...
Z411J] Displacement detector, shoulder...X sleeve 1 section 1 extractor, l
A... Y-axis f position sail generator, kell... Steel ball 〇 Figure 3 Mu〆 Figure 4 ρ1 6ta '' !ν 2ta l Figure 5 Figure 6 Figure 8\////

Claims (1)

[Claims] (1) Middle wall cylindrical? The main body 9 is supported by three positioning balls fixed to the lower 7 flange portions of the main body 9. A slider with a measuring element at the bottom and a steel ball tm which is housed in the sliding eyelid in the main body of the square with a conical recess in the center of the upper circumference, and which is connected to the recess at the bottom. , Xlllllllf position detectors and YIIllll] displacement detectors whose tips are in contact with the slider, which are installed at circumferential positions on the slider corresponding to the displacement in the X- and Y-axis directions, and the upper part of the slider. A three-axis displacement detector is provided with a two-axis displacement detector attached to the main body so as to be in contact with the center of the surface.