JPS58122441U - 半導体用石英ガラス炉芯管 - Google Patents

半導体用石英ガラス炉芯管

Info

Publication number
JPS58122441U
JPS58122441U JP1947882U JP1947882U JPS58122441U JP S58122441 U JPS58122441 U JP S58122441U JP 1947882 U JP1947882 U JP 1947882U JP 1947882 U JP1947882 U JP 1947882U JP S58122441 U JPS58122441 U JP S58122441U
Authority
JP
Japan
Prior art keywords
quartz glass
furnace core
semiconductors
core tube
glass furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1947882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS635225Y2 (enrdf_load_stackoverflow
Inventor
茶木　勝弘
塩川　武男
正義 遠藤
Original Assignee
東芝セラミツクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP1947882U priority Critical patent/JPS58122441U/ja
Publication of JPS58122441U publication Critical patent/JPS58122441U/ja
Application granted granted Critical
Publication of JPS635225Y2 publication Critical patent/JPS635225Y2/ja
Granted legal-status Critical Current

Links

JP1947882U 1982-02-15 1982-02-15 半導体用石英ガラス炉芯管 Granted JPS58122441U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1947882U JPS58122441U (ja) 1982-02-15 1982-02-15 半導体用石英ガラス炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1947882U JPS58122441U (ja) 1982-02-15 1982-02-15 半導体用石英ガラス炉芯管

Publications (2)

Publication Number Publication Date
JPS58122441U true JPS58122441U (ja) 1983-08-20
JPS635225Y2 JPS635225Y2 (enrdf_load_stackoverflow) 1988-02-12

Family

ID=30031686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1947882U Granted JPS58122441U (ja) 1982-02-15 1982-02-15 半導体用石英ガラス炉芯管

Country Status (1)

Country Link
JP (1) JPS58122441U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145260U (enrdf_load_stackoverflow) * 1974-05-20 1975-12-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145260U (enrdf_load_stackoverflow) * 1974-05-20 1975-12-01

Also Published As

Publication number Publication date
JPS635225Y2 (enrdf_load_stackoverflow) 1988-02-12

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