JPS58119824U - 空気浄化用ろ過装置 - Google Patents

空気浄化用ろ過装置

Info

Publication number
JPS58119824U
JPS58119824U JP1701382U JP1701382U JPS58119824U JP S58119824 U JPS58119824 U JP S58119824U JP 1701382 U JP1701382 U JP 1701382U JP 1701382 U JP1701382 U JP 1701382U JP S58119824 U JPS58119824 U JP S58119824U
Authority
JP
Japan
Prior art keywords
filtration device
filter
air purification
purification filtration
guide means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1701382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113049Y2 (enrdf_load_stackoverflow
Inventor
浅見　欽一郎
西山　国雄
Original Assignee
日立プラント建設株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立プラント建設株式会社 filed Critical 日立プラント建設株式会社
Priority to JP1701382U priority Critical patent/JPS58119824U/ja
Publication of JPS58119824U publication Critical patent/JPS58119824U/ja
Application granted granted Critical
Publication of JPS6113049Y2 publication Critical patent/JPS6113049Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP1701382U 1982-02-12 1982-02-12 空気浄化用ろ過装置 Granted JPS58119824U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1701382U JPS58119824U (ja) 1982-02-12 1982-02-12 空気浄化用ろ過装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1701382U JPS58119824U (ja) 1982-02-12 1982-02-12 空気浄化用ろ過装置

Publications (2)

Publication Number Publication Date
JPS58119824U true JPS58119824U (ja) 1983-08-15
JPS6113049Y2 JPS6113049Y2 (enrdf_load_stackoverflow) 1986-04-23

Family

ID=30029347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1701382U Granted JPS58119824U (ja) 1982-02-12 1982-02-12 空気浄化用ろ過装置

Country Status (1)

Country Link
JP (1) JPS58119824U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003007580A (ja) * 2001-06-19 2003-01-10 Canon Inc 温調エア供給装置及び半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003007580A (ja) * 2001-06-19 2003-01-10 Canon Inc 温調エア供給装置及び半導体製造装置

Also Published As

Publication number Publication date
JPS6113049Y2 (enrdf_load_stackoverflow) 1986-04-23

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