JPS5811696B2 - How to manufacture stylus parts - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a stylus component used in an electrostatic video disk device.

An electrostatic video disk device is used as an image reproducing device.

This video disk device has a rotatable disc-shaped recording plate with a spiral groove, and inside this groove is provided a plurality of convex portions that serve as signals, and at least the surface of the groove having the convex portions is provided. A conductive layer electrode is coated, and the surface of the conductive layer electrode is covered with a dielectric layer, which tracks inside the groove and selectively contacts the plurality of convex portions, and changes in capacitance are used as an output signal. The diamond stylus is equipped with a diamond stylus for detection, and a conductive layer electrode is provided on at least the surface of the tip of the diamond stylus.

In this type of device, the conductive layer electrode provided on the surface of the tip of the diamond stylus has conventionally been formed by adhering an aluminum film to the surface of the tip of the diamond stylus by, for example, '4i dry deposition, but the adhesion resistance is extremely poor. However, it had the disadvantage that it peeled off and would wear off when played.

The present invention eliminates these conventional drawbacks, and one embodiment thereof will be described below with reference to the drawings.

In the figure, reference numeral 1 denotes a disc-shaped recording plate that can be rotated in the direction of the arrow 7, and has a spiral groove formed on its surface, and the bottom of this groove has protrusions that are spaced adjacent to each other according to the signal to be recorded. A plurality of shaped portions 6 are formed.

The surface of the recording plate 1 or at least the surface of the groove including the convex portion 6 is coated with a conductive layer electrode 4, and the surface of the conductive layer electrode 4 is coated with a dielectric layer 5.

On the other hand, like a conventional record stylus, the single diamond stylus 2 that tracks inside the groove has at least the tip surface covered with a conductive layer electrode 3 made of titanium by vapor deposition, and this surface is protected by a titanium alloy film. Layer 8 is deposited.

Therefore, as the recording plate 1 rotates, the diamond stylus 2 traces the groove and selectively contacts the convex portion 6, and the conductive layer electrode 3 of the diamond stylus 2 and the recording plate 1
A change in capacitance caused by a change in the distance between the conductive layer electrode 4 and the conductive layer electrode 4 is detected as an output signal.

A video disc stylus component having such a structure is manufactured as follows.

That is, first, a metal such as titanium is vacuum-deposited on the diamond stylus 2, and then 800~
A simple heat treatment is performed at 2000° C. for, for example, one hour.

Then, the titanium diffuses into the diamond or chemically bonds with the diamond in the diamond surface layer to form titanium carbide and firmly adheres to the diamond.

Its adhesion resistance is 5 kg/- or more.

This forms the conductive layer electrode.

This example shows the case where titanium is used as the conductive layer electrode, but examples of this type of conductive layer electrode include titanium, zirconium, hafnium, vanadium, niobium, tantalum, and chromium.

molybdenum, tungsten, manganese, iron, cobalt,
It is also possible to use one or more of nickel and thorium.

In this case, vanadium, chromium, manganese, iron, cobalt, nickel, and thorium are used to form the above conductive layer electrode on the diamond by resistance heating vacuum evaporation, similar to titanium.

Further, the above conductive layer electrode is formed on the diamond by sputtering deposition or electron beam deposition of a high melting point metal such as zirconium, haunium, niobium, tantalum, molybdenum, or tungsten.

In order to strengthen the adhesion strength of these conductive layer electrodes to diamond, heat treatment is performed at a temperature of 800 DEG to 2000 DEG C. for 1 hour in a vacuum, as in the case of titanium.

In these cases, the heat treatment atmosphere and temperature are important.

In other words, since the diamond stylus is not oxidized by heat treatment, the atmosphere must be non-oxidizing, such as vacuum,
There must be an argon gas atmosphere.

If the heat treatment temperature is less than 800° C., the vapor-deposited metal will not diffuse into the diamond or chemically bond in the diamond surface layer, resulting in poor adhesion resistance of the vapor-deposited metal.

Furthermore, if the heat treatment temperature exceeds 2000° C., even if a very small amount of oxygen gas is present in the heat treatment atmosphere, the surface or the entire diamond stylus will be oxidized, making it unusable.

If the diamond stylus provided with the above conductive layer electrode is used without providing the surface protective layer 8, its practical life will be 1
It is about 00 hours.

On the other hand, the present inventors have found that the practical life of the diamond stylus can be significantly extended by laminating a surface protective layer made of, for example, a titanium alloy film on the conductive layer electrode to form a multilayer structure.

That is, the thickness of the conductive layer electrode is o, oi ~ 0.1μ
A surface protective layer made of T1-5AI-2Cr-I Fe with a thickness of about 0.05 to 0.5 μm is laminated on the conductive layer electrode by sputtering deposition, for example, and this is coated with a non-oxidizing material. Atmosphere, for example, 50
If heat treated for one hour at a temperature of 0 to 2000°C, the practical life of the diamond stylus will be several tens of degrees.
It was found that the time can be extended to more than 0 hours.

This excellent lifespan characteristic is due to the above titanium alloy sputtered film.
This is due to its excellent mechanical strength and heat resistance.

In this case, the titanium alloy is not limited to the above examples;
A titanium alloy containing one or more of palladium, copper, tin, chromium molybdenum, iron, vanadium, and manganese has excellent adhesion resistance and wear resistance.

That is, to give a specific example of its composition, Ti-0,5p
d, Ti-5AI-ICu, T1-5AI-
2,58n, T1-1-5AI-2Cr-I,
Ti-2AI-2Fe, TiTi-5AI-I, T
i-6AI-4V, Ti-4AI-4Mn, Ti-
4AI-3M.

-IV, Ti-8ATi-8AI-I, TiTi-7A
I-4゜Ti-8Mn, Ti-13V-11Cr-3A
I etc.

In the above examples, titanium alloy was shown, but in addition to titanium alloy, chromium alloy, molybdenum alloy, tungsten alloy,
Niobium alloys, tantalum alloys, and zirconium alloys are also effective.

In other words, chromium alloys containing one or more of molybdenum iron, cobalt, and titanium, aluminum, chromium,
Molybdenum alloy containing one or more of silicon, nickel, and boron; tungsten alloy containing one or more of molybdenum, zirconium, niobium, and dantal; one or more of tungsten, titanium, vanadium, molybdenum, and zirconium. niobium alloy containing titanium, hafnium, tungsten, niobium, zirconium, chromium, molybdenum, tantalum alloy containing one or more of vanadium, one or more of tin, iron, nickel, chromium, niobium, copper, molybdenum Zirconium alloys containing several types are effective.

In the above examples, sputtering deposition was used as the method for forming these alloy films, but this is because the alloy films can be deposited with little change in composition, and any similar method may be used. It is not limited to sputtering deposition.

For example, ion beam evaporation is also possible.

Although the heat treatment was carried out in a vacuum in the above embodiments, if the heat treatment is carried out in a carbonizing atmosphere such as methane gas or a nitriding atmosphere such as ammonia, the surface of the alloy layer becomes
Mechanical strength is further improved by carbonization and nitridation, respectively.

As described above, according to the present invention, it is possible to provide a stylus with a significantly long practical life, and it can be used in a video disk device with great effects.

[Brief explanation of drawings]

The figure is a sectional view of essential parts showing an example of a video disc device using a stylus component obtained according to the present invention. 1...recording board, 2...stylus, 3
... Conductive layer electrode, 4... Conductive layer electrode,
5... Dielectric layer, 6... Convex portion, 8...
...Surface protective layer.

Claims (1)

[Claims] 1 At least on the tip surface of the diamond stylus,
After forming a conductive layer electrode made of one or more of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, manganese, iron, cobalt, nickel, and thorium by vapor deposition, it was heated to 800 nm in a non-oxidizing atmosphere. A titanium alloy containing one or more of palladium, copper, tin, chromium, molybdenum, iron, vanadium, and manganese is heat-treated at a temperature of ℃ to 2000 ℃, and then □ vapor-deposited on the surface of this conductive layer electrode. Chromium alloys containing one or more of molybdenum, iron, cobalt, titanium, aluminum, chromium,
Molybdenum alloy containing one or more of silicon, nickel, and boron; tungsten alloy containing one or more of molybdenum, zirconium, niobium, and tantalum; one or more of tungsten, titanium, vanadium, molybdenum, and zirconium niobium alloy containing titanium, hafnium, tungsten, niobium, zirconium, chromium, molybdenum, tantalum alloy containing one or more of vanadium, one or more of tin, iron, nickel, chromium, niobium, copper, molybdenum A surface protective layer made of one selected from several types of zirconium alloys is formed, and this is further heated for 500°C in a non-oxidizing atmosphere.
A method for manufacturing a stylus component, characterized by heat treatment at a temperature of ~2000°C.