JPS58116226U - 半導体装置の製造装置 - Google Patents

半導体装置の製造装置

Info

Publication number
JPS58116226U
JPS58116226U JP1393982U JP1393982U JPS58116226U JP S58116226 U JPS58116226 U JP S58116226U JP 1393982 U JP1393982 U JP 1393982U JP 1393982 U JP1393982 U JP 1393982U JP S58116226 U JPS58116226 U JP S58116226U
Authority
JP
Japan
Prior art keywords
semiconductor device
device manufacturing
manufacturing equipment
support plates
evaporator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1393982U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128670Y2 (enrdf_load_stackoverflow
Inventor
久道　正孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1393982U priority Critical patent/JPS58116226U/ja
Publication of JPS58116226U publication Critical patent/JPS58116226U/ja
Application granted granted Critical
Publication of JPH0128670Y2 publication Critical patent/JPH0128670Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Prevention Of Fouling (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1393982U 1982-02-03 1982-02-03 半導体装置の製造装置 Granted JPS58116226U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1393982U JPS58116226U (ja) 1982-02-03 1982-02-03 半導体装置の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1393982U JPS58116226U (ja) 1982-02-03 1982-02-03 半導体装置の製造装置

Publications (2)

Publication Number Publication Date
JPS58116226U true JPS58116226U (ja) 1983-08-08
JPH0128670Y2 JPH0128670Y2 (enrdf_load_stackoverflow) 1989-08-31

Family

ID=30026424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1393982U Granted JPS58116226U (ja) 1982-02-03 1982-02-03 半導体装置の製造装置

Country Status (1)

Country Link
JP (1) JPS58116226U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0128670Y2 (enrdf_load_stackoverflow) 1989-08-31

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