JPS58110070U - 液相エピタキシヤル成長装置部品 - Google Patents

液相エピタキシヤル成長装置部品

Info

Publication number
JPS58110070U
JPS58110070U JP440082U JP440082U JPS58110070U JP S58110070 U JPS58110070 U JP S58110070U JP 440082 U JP440082 U JP 440082U JP 440082 U JP440082 U JP 440082U JP S58110070 U JPS58110070 U JP S58110070U
Authority
JP
Japan
Prior art keywords
raw material
material solution
liquid phase
epitaxial growth
phase epitaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP440082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS626137Y2 (cs
Inventor
幸裕 笹谷
石原　豊秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP440082U priority Critical patent/JPS58110070U/ja
Publication of JPS58110070U publication Critical patent/JPS58110070U/ja
Application granted granted Critical
Publication of JPS626137Y2 publication Critical patent/JPS626137Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP440082U 1982-01-16 1982-01-16 液相エピタキシヤル成長装置部品 Granted JPS58110070U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP440082U JPS58110070U (ja) 1982-01-16 1982-01-16 液相エピタキシヤル成長装置部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP440082U JPS58110070U (ja) 1982-01-16 1982-01-16 液相エピタキシヤル成長装置部品

Publications (2)

Publication Number Publication Date
JPS58110070U true JPS58110070U (ja) 1983-07-27
JPS626137Y2 JPS626137Y2 (cs) 1987-02-12

Family

ID=30017247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP440082U Granted JPS58110070U (ja) 1982-01-16 1982-01-16 液相エピタキシヤル成長装置部品

Country Status (1)

Country Link
JP (1) JPS58110070U (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129384A (ja) * 1974-09-06 1976-03-12 Oki Electric Ind Co Ltd Ekisoepitakisharuseichoho
JPS5247422U (cs) * 1975-09-30 1977-04-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5129384A (ja) * 1974-09-06 1976-03-12 Oki Electric Ind Co Ltd Ekisoepitakisharuseichoho
JPS5247422U (cs) * 1975-09-30 1977-04-04

Also Published As

Publication number Publication date
JPS626137Y2 (cs) 1987-02-12

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