JPS58110003A - Thin film thermistor element and method of producing same - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a thermistor element in which a thermistor heat-sensitive part and an insulator that supports it are integrated, has extremely good thermal response, and has no risk of disconnection due to vibration or shock, and its mass production. The purpose is to provide a manufacturing method suitable for

Conventionally, there is a thermistor element such as %1 [1 Figure 6].

This is done by forming a thermistor (2) and an electrode (3) in a thin film form on an alumina substrate (1). A thin metal IJ wire (4) is connected to the IE pole (3) by welding, and the entire back surface is covered with glass (5). Therefore,
When attempting to provide a thermistor element with extremely excellent thermal response using this configuration, the following drawbacks arise.

■Even if we try to make the shape as small as possible in order to improve thermal response, there is a limit due to the need for a holding part for the Lee ξ wire (4).Moreover, the ratio of the surface area of the heat sensitive part to the volume of the thermistor element, that is, the ratio Due to the limited surface area, the thermal time constant is on the order of milliseconds (msec) (in still air)
However, there are limits to providing a thermistor element with excellent thermal response.・ ■The lead wire (4) and the thermistor electrode (3) are connected by welding, but the tensile strength is low, so this is reinforced by the glass (5) coating on the surface. However, the glass (
By applying the coating 5), the thermal response properties are further deteriorated.

■For the lead wire (4) of the thermistor, use a metal wire with as small a diameter as possible (e.g. -0,151@), as there is a limit to reducing the size of the main body to improve thermal response. However, in this case, there is a risk that the lead wires will break due to vibrations, shocks, etc. under the usage conditions, resulting in insufficient reliability.

In addition, as shown in Figure 1, etc., there is a bead-shaped thermistor element in which a thermistor body (6) and a very thin metal wire (PT wire) (7) are integrally sintered, but this also has a lead wire. Because it is extremely thin (for example, the PT wire diameter is 60μ).

Vibration9. There is a risk that the lead wire may break due to impact, and reliability is insufficient.

Therefore, in the present invention, a thin film thermistor is provided on the surface of the metal conductor of FltA', and a single thin film pole is provided on the thermistor, so that the thermal response is good and there is no risk of disconnection due to vibration or impact. At the same time, the manufacturing process is carried out by forming a plurality of pieces of thermistor material in a thin film form along the longitudinal direction on the surface of a continuous linear metal body. This method enables mass production by forming a thin film electrode, then forming the thermistor material and electrode, and cutting this linear metal body into multiple pieces to obtain individual thin film thermistor materials. Embodiments of the invention will be described based on FIGS. 2 to 114.

Figure 118 is a cross-sectional view of the completed thin film thermistor element.

Figure IN4 shows a cross-sectional view of the manufacturing process. (8) is vibration.

A thin film thermistor formed to wrap around the surface of.

The trout is a thin film electrode formed on the thermistor (9).

During manufacturing, a constant f! is applied to the surface of a continuous linear metal body 0p along its longitudinal direction. Form a thermistor (・) of a predetermined length with fl r#Sl, then the thermistor (9)
Form an electric wire αQ on top of each other, and then draw a cutting line■
Then, this linear insulator Oρ is cut and divided into individual thin film thermistor elements.

With this configuration, even if a thin wire metal conductor (8) with a diameter of 11,111 mm or less is used and the outer diameter of the finished shape of the thermistor element is set to one tone or less, the various conditions can be satisfied. You can get something.

In the above embodiment, one electrode a was formed on the thermistor (9), facing the linear metal conductor (8).

As shown in Figure @8, this is done by discretely connecting multiple electrodes 0O(
2) It is also possible to implement the same method when - is provided.

As described above, the thin film thermistor element and the method for manufacturing the same according to the present invention have the following effects. Because it is possible to use a thin diameter conductor as a medium metal conductor,
A linear thermistor element with a thin outer diameter can be formed. Moreover, since the thermistor as a heat-sensitive part is formed in a thin film over a wide area on the surface, the specific surface area is large, and since it is based on a metal body with good thermal conductivity, it has a large heat dissipation coefficient and extremely excellent thermal response. Thermistor element can be provided L (li) Because the thermistor heat sensitive part and the linear metal conductor supporting it can be integrated.

By supporting the electrode portions at both ends, it is possible to provide a high-responsive thermistor element with no fear of disconnection due to vibration or stress. (I
Since the D electrode can be formed to any length on the surface of the thermistor's heat-sensitive part, the resistance value can be easily adjusted, and the mass production effect is extremely high. eV) By using a continuous linear metal conductor and simultaneously producing a large number of them in succession, the mass production effect is high and it can be provided at low cost.

[Brief explanation of the drawing]

Ii1 Figure ω(b) is a cross-sectional view of a conventional thin film thermistor element and an explanatory diagram of a bead-type thermistor element, Figure 2 is a vertical cross-sectional view of an embodiment of the thin film thermistor element of the present invention; Vertical sectional view of the example, is the 4th land a thin film in the 2nd figure? - It is a longitudinal cross-sectional view of the manufacturing process of the E star element. (2) - Linear metal conductor, (9)... thermistor, αQ
...electrode, a linear metal conductor with continuous 0-1 degrees)...
Cutting line agent Yoshihiro Morimoto □

Claims (1)

[Claims] 1. A thin film thermistor element in which a thin film thermistor is provided on the surface of a linear metal conductor, and a thin film electrode is provided on the thermistor. 2. The thin film thermistor material according to claim 1, which uses a linear metal conductor having a diameter of 11,118 mm or less. & Form a plurality of thermistor materials in the form of a thin film along the longitudinal direction on the surface of a continuous linear metal body, then form the plurality of thin film electrodes on the heat-sensitive portion of the thermistor, and then manufacturing method.