JPS58103992A - External optical apparatus for laser processing machine - Google Patents

External optical apparatus for laser processing machine

Info

Publication number
JPS58103992A
JPS58103992A JP56203911A JP20391181A JPS58103992A JP S58103992 A JPS58103992 A JP S58103992A JP 56203911 A JP56203911 A JP 56203911A JP 20391181 A JP20391181 A JP 20391181A JP S58103992 A JPS58103992 A JP S58103992A
Authority
JP
Japan
Prior art keywords
laser
nozzle
lens
laser beams
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56203911A
Other languages
Japanese (ja)
Inventor
Yasutada Iwaguchi
保忠 岩口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56203911A priority Critical patent/JPS58103992A/en
Publication of JPS58103992A publication Critical patent/JPS58103992A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To decrease the variation of a laser output and to prevent a lens strain etc. by providing a means for absorbing laser beams between a lens mounting part and an exit hole of laser beams at a nozzle part of an external optical apparatus. CONSTITUTION:A laser absorbing barrel 18 provided with a laser absorbing part 17 painted with a laser absorbing agent 16 is attached between the nozzle 8 fixed at the nozzle mounting part 14 and the lens mounting part 12. Thereby, the laser beams excepting beams which are penetrated the exit hole 9 of the laser beams are reflected to a specified direction at the part 17 and almost all of the laser beams are absorbed due to an effect of the agent 16. Thus, the laser beams impinged to the nozzle 8 are passed through a hole diameter D', are reflected and absorbed at the lense mounting parts 12, 11. Accordingly the force is not so strong to give an effect to cause the strain for a lens 4. A more amount of the laser beams entered a condenser lens 4 can be picked out from the hole 9.

Description

【発明の詳細な説明】 本発明は、レーザを用いて加工を行うレーザ加工機にお
いて、レーザビーム径よりも小さいレーザビーム出ロ穴
を有するノズルを使用する外部光学装置で、反射レーザ
によって発生するレーザ出力の変動(被加工物に対する
変動であり、レーザビーム出口穴に対するレーザ位置変
更が加工に影響がある場合)を低減させる必要のあるレ
ーザ加工機、また被加工物またはノズル内からのレーザ
外部光学装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention is an external optical device that uses a nozzle having a laser beam exit hole smaller than the laser beam diameter in a laser processing machine that performs processing using a laser. Laser processing machines that need to reduce fluctuations in laser output (variations relative to the workpiece, where changes in the laser position relative to the laser beam exit hole affect machining), and laser output from the workpiece or outside of the nozzle Related to optical devices.

まずレーザ加工機の一般的利用原理を第1図に示す。図
において、1はレーザ発振器、2はレーザビーム、3は
そのレーザビーム2を屈折させる全反射ミラー、4はレ
ーザビーム2を集光させるための集光レンズ、6はアシ
ストガスを吹き付けるためのノズル、6はレーザビーム
の焦点、7は被加工物を示す。
First, Figure 1 shows the general principle of use of a laser processing machine. In the figure, 1 is a laser oscillator, 2 is a laser beam, 3 is a total reflection mirror that refracts the laser beam 2, 4 is a condensing lens for condensing the laser beam 2, and 6 is a nozzle for spraying assist gas. , 6 is the focal point of the laser beam, and 7 is the workpiece.

第2図は従来のレーザ加工機用の外部光学装置を示す。FIG. 2 shows an external optical device for a conventional laser processing machine.

レーザビーム2は全反射ミラー3によって集光レンズ4
に屈折され、ノズル8のレーザビーム出ロ穴兼ガス出口
穴9から被加工物に照射される。1oはノズル8のガス
入口である。
The laser beam 2 is passed through a total reflection mirror 3 to a condensing lens 4.
The laser beam is refracted and irradiated onto the workpiece through the laser beam exit hole/gas exit hole 9 of the nozzle 8. 1o is the gas inlet of the nozzle 8.

通常、i光レンズ4はレンズマウント部11゜12によ
って挾まれており、ねじ13でノズルマウント部14に
固定されている。またノズル8はねじ16によってノズ
ルマウント部14に固定されている。この固定は図のよ
うなねじ15でなく、袋ナツトやバチ7錠などを用いて
行ってもよい。
Normally, the i-light lens 4 is held between lens mount parts 11 and 12, and is fixed to a nozzle mount part 14 with a screw 13. Further, the nozzle 8 is fixed to the nozzle mount section 14 by a screw 16. This fixing may be performed using a cap nut, a drumstick, etc., instead of the screws 15 as shown in the figure.

レーザビーム2が正常にミラー中心点に照射され、全反
射ミラ−30角度の調整がよければ、レーザビーム2は
ノズル8のレーザビーム出口穴9より入力量とほぼ同等
、被加工物側へ貫通するが、通常全反射ミラー3はある
不明な位置にあり、たとえば全反射ミラー3が誤位置の
場合、レーザビーム2はレーザビーム出口穴9より出な
いでノズル8内で反射をくり返えしながらノズル8およ
びレンズマウント部12に大半のレーザビームカ吸収さ
れる。レンズマウント部12に吸収されたレーザによっ
てレンズマウント部12は熱膨張し、レンズ4に歪を与
え゛る。歪の発生したレンズ4はレーザのモードを悪化
させ、また通過後のレーザビームの透過角度が不定とな
り、結果としてレーザ加工ができなくなる。
If the laser beam 2 is correctly irradiated to the mirror center point and the angle of the total reflection mirror 30 is well adjusted, the laser beam 2 will penetrate from the laser beam exit hole 9 of the nozzle 8 to the workpiece side with an amount almost equal to the input amount. However, normally the total reflection mirror 3 is located at an unknown position. For example, if the total reflection mirror 3 is in the wrong position, the laser beam 2 will not exit from the laser beam exit hole 9 and will be reflected repeatedly within the nozzle 8. However, most of the laser beam power is absorbed by the nozzle 8 and the lens mount section 12. The lens mount section 12 thermally expands due to the laser beam absorbed by the lens mount section 12, giving distortion to the lens 4. The distorted lens 4 deteriorates the laser mode, and the transmission angle of the laser beam after passing through becomes unstable, making laser processing impossible.

これを解決する方法としては第3図のようにノズル8の
集光レンズ側に鍔を付ける方法や、第4図のようにレー
ザビーム往に合わせてノズル8の内径そのものを小さく
する方法がある。しかし、合はより直接レーザビームが
反射して戻るので、集光レンズ4よりもレーザ発振器そ
のものへ戻り、出力を低下させてしまう。これはキャビ
ティ長(終段ミラーと出力ミラーとの距離)が終’15
1. ミラー、ノズル間となり、その間で多少の発振が
発生することに起因する。
To solve this problem, there is a method of attaching a flange to the condensing lens side of the nozzle 8 as shown in Figure 3, or a method of reducing the inner diameter of the nozzle 8 itself in accordance with the direction of the laser beam as shown in Figure 4. . However, in this case, the laser beam is reflected more directly and returns to the laser oscillator itself rather than to the condenser lens 4, reducing the output. This means that the cavity length (distance between the final stage mirror and the output mirror) is
1. This is caused by the fact that some oscillation occurs between the mirror and the nozzle.

本発明は、集光レンズに入ったレーザビームをノズル先
端のレーザビーム出口穴より、より多く取り出し損失の
少ない外部光学゛装置を提供しようとするものである。
The present invention aims to provide an external optical device that can extract more of the laser beam that has entered the condensing lens through the laser beam exit hole at the tip of the nozzle and has less loss.

すなわち、初期の調整時のように、はぼ100%のレー
ザビームがノズル内で反射する場合でもカーボン系塗料
などのレーザ吸収剤を塗布したレーザ吸収筒部を設け、
安定したレーザ出力、光軸を得ようとするものである。
In other words, even when nearly 100% of the laser beam is reflected within the nozzle, as in the initial adjustment, a laser absorbing cylinder coated with a laser absorbing agent such as carbon paint is provided.
The aim is to obtain stable laser output and optical axis.

第6図は本発明による外部光学装置の一実施例であり、
第2図と同等部分には同一番号を付している。ノズルマ
ウント部14、ノズル8およびその相互の取付方法は第
2図に示す従来の装置と同じであるが、ノズル8とレン
ズマウント部12間にレーザ吸収剤16を塗布しだlレ
ーザ吸収部17を設けたIレーザ吸収筒1Bを取り付け
る。これによりレーザビーム出口穴9より貫通したレー
ザ以外のレーザは大半が反射、再反射をくり返えすが、
レーザ吸収部17での反射は特定の方向(筒の細い方向
)へ再反射するのでレーザ吸収剤16の効果とともに、
はぼ全量吸収される。これによりノズル8に当ったレー
ザビームが穴径D′を通過してレンズマウント部12や
11に反射吸収され、レンズ4に歪を与える程の力には
なり得ない。また設計的にはD(D’の径関係とする。
FIG. 6 shows an embodiment of the external optical device according to the present invention,
Parts equivalent to those in FIG. 2 are given the same numbers. The nozzle mount section 14, the nozzle 8, and the method of attaching them to each other are the same as those of the conventional device shown in FIG. Attach the I laser absorption tube 1B provided with the I laser absorption tube 1B. As a result, most of the laser beams other than those that penetrated through the laser beam exit hole 9 are reflected and re-reflected repeatedly.
Since the reflection at the laser absorption part 17 is re-reflected in a specific direction (the narrow direction of the tube), in addition to the effect of the laser absorption agent 16,
The entire amount is absorbed. As a result, the laser beam hitting the nozzle 8 passes through the hole diameter D' and is reflected and absorbed by the lens mount portions 12 and 11, so that it cannot become a force sufficient to cause distortion to the lens 4. In addition, in terms of design, the diameter relationship is D (D').

なお、レーザ吸収筒18には、空冷、水冷、油冷等の冷
却構造を付設してもよい。
Note that the laser absorption cylinder 18 may be provided with a cooling structure such as air cooling, water cooling, oil cooling, or the like.

以上のような構成よりなる本発明の外部光学装置によれ
は、ノズルにて反射したレーザビームの大半が吸収され
、これにより最も影響を受けやすいレンズに歪を与える
程のパワーを持ったレーザビームが反射で戻ることがな
く、初期調整時もレーザビームの反射に関係なく長時間
かけて微調整することができる。また機構的に非常に単
純な構造であり、安価に供給できる。
The external optical device of the present invention having the above configuration absorbs most of the laser beam reflected by the nozzle, thereby producing a laser beam with enough power to distort the lens that is most susceptible to the effects. The laser beam does not return due to reflection, and even during initial adjustment, fine adjustments can be made over a long period of time regardless of the reflection of the laser beam. Furthermore, it has a very simple structure mechanically and can be supplied at low cost.

さらにすでに市場に出ている装置についても容易に追加
工ができ、その実用性には大なるものがある。
Furthermore, additional modifications can be easily made to devices that are already on the market, making them highly practical.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はレーザ加工機の概略構成を示す正面図、第2図
は従来のレーザ加工機用外部光学装置の断面正面図、第
3図、第4図は従来のノズルの概略断面正面図、第6図
は本発明によるレーザ外工機用外部光学装置の一実施例
の断面正面図である。 1・・・・・・レーザ発振器、2・・・・・・レーザビ
ーム、4・・・・・・集光レンズ、7・・・・・・被加
工物、8・・・・・・ノズル、9・・・・・・レーザビ
ーム出口穴、11,12・・・・・・レンズマウン)L
13・・・・・・ねじ、14・・・・・ノズルマウント
部、16・・・・・・ねじ、16・・・・・・レーザ吸
収剤、17・・・・・・レーザ吸収部、18・・・・・
・レーザ吸収筒。 第1図 第 2 図 第3図   WIJ4図 第5図 手続補正書 昭和57年 6月2を日 特許庁長官殿 1事件の表示 昭和66年特許願第203911、 発明の名称 レーザ加工機用外部光学装置 3補正をする者 事件との関係      特  許  出  願  人
任 所  大阪府門真市大字門真1006番地名 称 
(582)松下電器産業株式会社代表者    山  
下  俊  彦 4代理人 〒571 住 所  大阪府門真市大字門真1006番地松下電器
産業株式会社内 6補正の対象 明細書の図面の簡単な説明の欄 6、補正の内容 明細書第6頁第13行の「レーザ外工機」を「レーザ加
工機」に補正いたします。
Fig. 1 is a front view showing a schematic configuration of a laser processing machine, Fig. 2 is a cross-sectional front view of a conventional external optical device for a laser processing machine, Figs. 3 and 4 are schematic cross-sectional front views of a conventional nozzle, FIG. 6 is a cross-sectional front view of an embodiment of the external optical device for a laser cutting machine according to the present invention. 1... Laser oscillator, 2... Laser beam, 4... Condensing lens, 7... Workpiece, 8... Nozzle , 9... Laser beam exit hole, 11, 12... Lens mount) L
13... Screw, 14... Nozzle mount part, 16... Screw, 16... Laser absorbent, 17... Laser absorbing part, 18...
・Laser absorption tube. Fig. 1 Fig. 2 Fig. 3 WIJ Fig. 4 Fig. 5 Procedural amendment June 2, 1980, to the Commissioner of the Japanese Patent Office 1986 Patent Application No. 203911, Title of Invention: External optics for laser processing machine Relationship with the device 3 amendment person case Patent application Appointment Location 1006 Kadoma, Kadoma City, Osaka Prefecture Name
(582) Matsushita Electric Industrial Co., Ltd. Representative Yama
Toshihiko Shimo 4 Agent 571 Address 1006 Oaza Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. Column 6 for a brief explanation of the drawings in the specification subject to the amendment, page 6, 13 of the statement of contents of the amendment We will correct "Laser external processing machine" in the row to "Laser processing machine".

Claims (1)

【特許請求の範囲】[Claims] ノズルマウント部と、そのノズルマウント部に取り付け
られたレーザ加工機のレーザビームを集光するための集
光レンズをマウントしたレンズマウント部と、前記ノズ
ルマウント部に取り付けられた被加工物に供給するアシ
ストカスを案内するノズルト、前記レンズマウント部と
前記ノズルのレーザビーム出口穴との間に設けられたレ
ーザ吸収装置とからなることを特徴とするレーザ加工機
用外部光学装置。
A nozzle mount part, a lens mount part mounted with a condensing lens for condensing a laser beam of a laser processing machine attached to the nozzle mount part, and a workpiece attached to the nozzle mount part. 1. An external optical device for a laser processing machine, comprising: a nozzle for guiding assist dregs; and a laser absorption device provided between the lens mount section and a laser beam exit hole of the nozzle.
JP56203911A 1981-12-17 1981-12-17 External optical apparatus for laser processing machine Pending JPS58103992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56203911A JPS58103992A (en) 1981-12-17 1981-12-17 External optical apparatus for laser processing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56203911A JPS58103992A (en) 1981-12-17 1981-12-17 External optical apparatus for laser processing machine

Publications (1)

Publication Number Publication Date
JPS58103992A true JPS58103992A (en) 1983-06-21

Family

ID=16481733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56203911A Pending JPS58103992A (en) 1981-12-17 1981-12-17 External optical apparatus for laser processing machine

Country Status (1)

Country Link
JP (1) JPS58103992A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60181283U (en) * 1984-05-09 1985-12-02 株式会社東芝 Laser light irradiation tool
US4871897A (en) * 1986-09-01 1989-10-03 Instituttet For Produktudvikling Nozzle for laser processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60181283U (en) * 1984-05-09 1985-12-02 株式会社東芝 Laser light irradiation tool
US4871897A (en) * 1986-09-01 1989-10-03 Instituttet For Produktudvikling Nozzle for laser processing

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