JPS58102180A - X ray spectroscopy - Google Patents

Abstract

PURPOSE:To form a spectro-photometer of soft X ray in a compact size by measuring photoelectrons released from a nitrogen absorbed layer when X ray irradiates the layer. CONSTITUTION:A metal substrate 2 is cooled with a cooler 3 full of liquid helium so that a nitrogen gas will be adsorbed on the surface thereof to form a nitrogen adsorbed layer 4. When X ray to be measured irradiates the layer 4, photoelectrons 5 are released therefrom 4. Kinetic energy of the photoelectrons 5 give various values according to various frequencies, which the X ray 1 contains. Then, the ptotoelectrons 5 are introduced to a kinetic energy discriminator 6 to measure the kinetic energy of the electrons along with the quantity thereof, which provides a spectrum with the kinetic energy corresponding to the wavelength of X ray and the quantity of the photoelectrons corresponding to the luminous intensity thereof.

Description

[Detailed description of the invention]

The uninvention is X-1, especially soft X I in the wavelength range lI to 30X.
IQ) XII spectroscopy that allows easy measurement of wavelength and intensity
:UTru〇Conventional X@ spectroscopy uses ■semiconductor detection III 41
1.■ Diffraction crystal (or diffraction grating)

[Use is roughly divided into U], Zara&:@ is ■ Diffraction crystal (or diffraction grating) rt
There are two types: one in which the measurement is performed while moving on the O-Land circumference, and one in which the X1m film is placed on the same Rowland circumference as the Rowland circle on which the diffraction crystal (or diffraction grating) is placed. By the way, among these X-ray spectroscopy methods, ■ is a short pulse
In addition to being unlucky in determining the Ha U spectral sensitivity, it is difficult to detect soft xlI with a wavelength of 101 or more ◎ In addition, QJ requires a long time for spectrophotometric titration of pulsed XII, making it impractical. . Furthermore, the @ of ① has the disadvantage that the focal point of the diffraction crystal (or diffraction grating) becomes longer as the wavelength of X- becomes longer, making the device difficult to grasp. X@. It is possible to measure the spectrophotometry of soft Xs within X1m1 of continuous radiation, and it is possible to use a small-sized device [Measureable X@Spectroscopy]. By determining the kinetic energy and quantity of the photoelectrons emitted by the
o Soft XII wavelength and intensity III constant T rt41
1 mold is defined as 0 or less, non-invention [explained in detail with reference to Figure 11+rt'r&II/figure is non-invention σ] An example xm, m is the metal substrate, 8 is the cooler, board is the nitrogen adsorption layer, b
is a photoelectron, 6 is a kinetic energy discriminator for a single photon, and 7 is a vacuum container. The metal substrate 8 is finished in a clean state,
For example, the cooler B& filled with liquid helium etc.: Therefore, it is sufficiently cooled, and by depositing N gas on 1111, a nitrogen adsorbing jilt is formed. If the spectrum T is multiplied by X@1tj111 rays T, photoelectrons are emitted from the nitrogen adsorption layer. Ordinarily, the orbital electrons of nitrogen bond with the atomic nucleus with a binding energy of Jetts eV and maintain a stable state of 1 m, but when exposed to an irradiation tube with a frequency of νu =
←1iik) ・V as It becomes a photoelectron with kinetic energy and jumps out into the vacuum. X-rays or various frequencies [depending on the number of vibrations included, the kinetic energy Bk of photoelectrons is also included! At the 40th point, the photoelectrons are guided to the kinetic energy valve N116 to measure the kinetic energy, and at the same time the photoelectron position is measured. Then, a spectrum like T shown in τsam is obtained. This allows the spectrophotometric intensity of Xll to be measured. These titrations are carried out in vacuum volume III to prevent the absorption of X@ by air and the scattering tube of photoelectrons. It takes place inside. In this measurement, if a photographic film type tube is used as a kinetic energy discriminator, spectroscopy is possible even when xII is a short pulse. In addition, the XII wavelength is hν<392? In the eV condition, that is, in the wavelength range of Jl/A or more, photoelectrons are attenuated. Nitrogen subjected to X-ray irradiation with a frequency of ν also emits photoelectrons of hsheet ttS and V due to the Auger effect, so the wavelength of T corresponds to the frequency of hν > ttS and V.
@sl or below XII#) Not suitable for spectroscopy. Therefore, the measurable Xs wavelength when using a nitrogen adsorption layer is /#-JOK. Figure 113 shows another embodiment of the present invention. In this figure, the same components as II/It are labeled with the same code. In this figure, nitrogen gas
Nitrogen gas introduced into 1111 contains [11aJ
Xh irradiation hole School 1 in Energy Discrimination I#6
(2) 111I foot similar to rh s & [By doing so, the spectrophotometric intensity of X-rays can be measured. In the figure, t3t* is Xh*1NN11% vacuum to prevent absorption of X-rays by nitrogen gas and scattering of photoelectrons, respectively.
As mentioned above, the present invention is capable of controlling photoelectron Q) kinetic energy and quantity tllji! Spectroscopy of XaN by T
conduct. According to the present invention, it is possible to perform spectrophotometric titration of soft X11 without pulsed radiation [sigma]X-1 continuous radiation XIIMRt8, and there is an advantage that the apparatus 11f can be made smaller using only one device.

[Brief explanation of the drawing]

Figure 1 shows the present invention U] One embodiment [Explanation (2),
2) is a T diagram showing the relationship between the intensity (kinetic energy and (1)) of photoelectrons titrated in the same v4 example, IK, and Figure 7 is an explanatory diagram showing another example of Favorite-QJ. 1...X-, G...Metal substrate, 8...River cooler, No....Nitrogen adsorption layer, 6...
・Photoelectron, 6...Kinetic energy discriminator, 7.
...Vacuum container, 9...Nitrogen gas, lO.
...Nozzle %11...°...xsn radiation III,
1m...XIl irradiation hole. Applicant Nippon Telegraph and Telephone Public Corporation Figure 1 7 Figure 2 Movement Ninel N - Figure 3 41

Claims (1)

[Claims] By determining the kinetic energy and amount of photoelectrons emitted from nitrogen, the wavelength range 1 can be determined.
2 ~ Determining the wavelength and intensity of JQ human soft XII [Characteristics of xs1 spectroscopy