JPS5794637A - Electronic spectroscope - Google Patents

Electronic spectroscope

Info

Publication number
JPS5794637A
JPS5794637A JP55171144A JP17114480A JPS5794637A JP S5794637 A JPS5794637 A JP S5794637A JP 55171144 A JP55171144 A JP 55171144A JP 17114480 A JP17114480 A JP 17114480A JP S5794637 A JPS5794637 A JP S5794637A
Authority
JP
Japan
Prior art keywords
sample
rays
soft
electron
anticathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55171144A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112539B2 (enrdf_load_stackoverflow
Inventor
Sumio Sasaki
Masao Murota
Kenji Kojima
Takashi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55171144A priority Critical patent/JPS5794637A/ja
Publication of JPS5794637A publication Critical patent/JPS5794637A/ja
Publication of JPS6112539B2 publication Critical patent/JPS6112539B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP55171144A 1980-12-04 1980-12-04 Electronic spectroscope Granted JPS5794637A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55171144A JPS5794637A (en) 1980-12-04 1980-12-04 Electronic spectroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55171144A JPS5794637A (en) 1980-12-04 1980-12-04 Electronic spectroscope

Publications (2)

Publication Number Publication Date
JPS5794637A true JPS5794637A (en) 1982-06-12
JPS6112539B2 JPS6112539B2 (enrdf_load_stackoverflow) 1986-04-09

Family

ID=15917796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55171144A Granted JPS5794637A (en) 1980-12-04 1980-12-04 Electronic spectroscope

Country Status (1)

Country Link
JP (1) JPS5794637A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461050U (enrdf_load_stackoverflow) * 1990-10-04 1992-05-26

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63101128U (enrdf_load_stackoverflow) * 1986-12-22 1988-07-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461050U (enrdf_load_stackoverflow) * 1990-10-04 1992-05-26

Also Published As

Publication number Publication date
JPS6112539B2 (enrdf_load_stackoverflow) 1986-04-09

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