JPS5792746A - Electron-ray output device - Google Patents

Electron-ray output device

Info

Publication number
JPS5792746A
JPS5792746A JP55168080A JP16808080A JPS5792746A JP S5792746 A JPS5792746 A JP S5792746A JP 55168080 A JP55168080 A JP 55168080A JP 16808080 A JP16808080 A JP 16808080A JP S5792746 A JPS5792746 A JP S5792746A
Authority
JP
Japan
Prior art keywords
filament
electron
voltage cable
wehnelt
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55168080A
Other languages
Japanese (ja)
Inventor
Hisahiro Furuya
Osamu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55168080A priority Critical patent/JPS5792746A/en
Publication of JPS5792746A publication Critical patent/JPS5792746A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To reduce the magnitude of electric discharge, and prevent any electrical interference with other devices by inserting control elements between a high- voltage cable and a filament, which are introduced into an electron-ray output device from outside the device. CONSTITUTION:An insulator 17 is attached to the top end of a cylinder 15, with a vacuum packing 16 interposed between the insulator 17 and the cylinder 15. A filament 6 and a Wehnelt 7 are fixed to the insulator 17. A high-voltage cable 14 is connected to the filament 6 by means of control elements 11 and 12. The high-voltage cable 14 is connected to the Wehnelt 7 by means of a control element 13. Electron rays are discharged through high-voltage, which is applied to the filament 6 by means of the high-voltage cable 14. The electron rays discharged are sent through the slit of the Wehnelt 7, passed through the slit of an anode 8, and are irradiated on a sample.
JP55168080A 1980-12-01 1980-12-01 Electron-ray output device Pending JPS5792746A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55168080A JPS5792746A (en) 1980-12-01 1980-12-01 Electron-ray output device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55168080A JPS5792746A (en) 1980-12-01 1980-12-01 Electron-ray output device

Publications (1)

Publication Number Publication Date
JPS5792746A true JPS5792746A (en) 1982-06-09

Family

ID=15861467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55168080A Pending JPS5792746A (en) 1980-12-01 1980-12-01 Electron-ray output device

Country Status (1)

Country Link
JP (1) JPS5792746A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7777194B2 (en) 2007-03-14 2010-08-17 Hitachi High-Technologies Corporation Charged particle beam apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7777194B2 (en) 2007-03-14 2010-08-17 Hitachi High-Technologies Corporation Charged particle beam apparatus

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