JPS579116Y2 - - Google Patents

Info

Publication number
JPS579116Y2
JPS579116Y2 JP8272679U JP8272679U JPS579116Y2 JP S579116 Y2 JPS579116 Y2 JP S579116Y2 JP 8272679 U JP8272679 U JP 8272679U JP 8272679 U JP8272679 U JP 8272679U JP S579116 Y2 JPS579116 Y2 JP S579116Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8272679U
Other languages
Japanese (ja)
Other versions
JPS56598U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8272679U priority Critical patent/JPS579116Y2/ja
Publication of JPS56598U publication Critical patent/JPS56598U/ja
Application granted granted Critical
Publication of JPS579116Y2 publication Critical patent/JPS579116Y2/ja
Expired legal-status Critical Current

Links

JP8272679U 1979-06-16 1979-06-16 Expired JPS579116Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8272679U JPS579116Y2 (en, 2012) 1979-06-16 1979-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8272679U JPS579116Y2 (en, 2012) 1979-06-16 1979-06-16

Publications (2)

Publication Number Publication Date
JPS56598U JPS56598U (en, 2012) 1981-01-06
JPS579116Y2 true JPS579116Y2 (en, 2012) 1982-02-22

Family

ID=29315944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8272679U Expired JPS579116Y2 (en, 2012) 1979-06-16 1979-06-16

Country Status (1)

Country Link
JP (1) JPS579116Y2 (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343232Y2 (en, 2012) * 1987-09-30 1991-09-10
JPH0343233Y2 (en, 2012) * 1987-09-30 1991-09-10
JP2501221B2 (ja) * 1988-01-13 1996-05-29 株式会社日立製作所 イオンビ―ム加工装置

Also Published As

Publication number Publication date
JPS56598U (en, 2012) 1981-01-06

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