JPS578735U - - Google Patents
Info
- Publication number
- JPS578735U JPS578735U JP8464980U JP8464980U JPS578735U JP S578735 U JPS578735 U JP S578735U JP 8464980 U JP8464980 U JP 8464980U JP 8464980 U JP8464980 U JP 8464980U JP S578735 U JPS578735 U JP S578735U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8464980U JPS578735U (ja) | 1980-06-16 | 1980-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8464980U JPS578735U (ja) | 1980-06-16 | 1980-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS578735U true JPS578735U (ja) | 1982-01-18 |
Family
ID=29446939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8464980U Pending JPS578735U (ja) | 1980-06-16 | 1980-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS578735U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015138859A (ja) * | 2014-01-22 | 2015-07-30 | 三菱電機株式会社 | ウエハチャックおよびウエハチャック補助具 |
| JP2018041968A (ja) * | 2017-10-06 | 2018-03-15 | 三菱電機株式会社 | ウエハチャック補助具 |
-
1980
- 1980-06-16 JP JP8464980U patent/JPS578735U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015138859A (ja) * | 2014-01-22 | 2015-07-30 | 三菱電機株式会社 | ウエハチャックおよびウエハチャック補助具 |
| JP2018041968A (ja) * | 2017-10-06 | 2018-03-15 | 三菱電機株式会社 | ウエハチャック補助具 |