JPS5784738U - - Google Patents
Info
- Publication number
- JPS5784738U JPS5784738U JP16222880U JP16222880U JPS5784738U JP S5784738 U JPS5784738 U JP S5784738U JP 16222880 U JP16222880 U JP 16222880U JP 16222880 U JP16222880 U JP 16222880U JP S5784738 U JPS5784738 U JP S5784738U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16222880U JPS5784738U (ja) | 1980-11-13 | 1980-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16222880U JPS5784738U (ja) | 1980-11-13 | 1980-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5784738U true JPS5784738U (ja) | 1982-05-25 |
Family
ID=29521109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16222880U Pending JPS5784738U (ja) | 1980-11-13 | 1980-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5784738U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60200963A (ja) * | 1984-03-23 | 1985-10-11 | Hitachi Ltd | 薄膜形成装置 |
-
1980
- 1980-11-13 JP JP16222880U patent/JPS5784738U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60200963A (ja) * | 1984-03-23 | 1985-10-11 | Hitachi Ltd | 薄膜形成装置 |