JPS5778665U - - Google Patents

Info

Publication number
JPS5778665U
JPS5778665U JP14156381U JP14156381U JPS5778665U JP S5778665 U JPS5778665 U JP S5778665U JP 14156381 U JP14156381 U JP 14156381U JP 14156381 U JP14156381 U JP 14156381U JP S5778665 U JPS5778665 U JP S5778665U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14156381U
Other languages
Japanese (ja)
Other versions
JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14156381U priority Critical patent/JPS6234473Y2/ja
Publication of JPS5778665U publication Critical patent/JPS5778665U/ja
Application granted granted Critical
Publication of JPS6234473Y2 publication Critical patent/JPS6234473Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14156381U 1981-09-24 1981-09-24 Expired JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14156381U JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-24 1981-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14156381U JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-24 1981-09-24

Publications (2)

Publication Number Publication Date
JPS5778665U true JPS5778665U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-05-15
JPS6234473Y2 JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-02

Family

ID=29501382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14156381U Expired JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-09-24 1981-09-24

Country Status (1)

Country Link
JP (1) JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS6234473Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-02

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