JPS577834B2 - - Google Patents
Info
- Publication number
- JPS577834B2 JPS577834B2 JP7897076A JP7897076A JPS577834B2 JP S577834 B2 JPS577834 B2 JP S577834B2 JP 7897076 A JP7897076 A JP 7897076A JP 7897076 A JP7897076 A JP 7897076A JP S577834 B2 JPS577834 B2 JP S577834B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7897076A JPS535496A (en) | 1976-07-05 | 1976-07-05 | Laser machining method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7897076A JPS535496A (en) | 1976-07-05 | 1976-07-05 | Laser machining method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS535496A JPS535496A (en) | 1978-01-19 |
| JPS577834B2 true JPS577834B2 (en:Method) | 1982-02-13 |
Family
ID=13676746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7897076A Granted JPS535496A (en) | 1976-07-05 | 1976-07-05 | Laser machining method and device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535496A (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012009824A (ja) * | 2010-05-11 | 2012-01-12 | Ultratech Inc | ライン結像システム及びレーザアニール方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176929A (ja) * | 1982-04-09 | 1983-10-17 | Fujitsu Ltd | 半導体装置の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4318478Y1 (en:Method) * | 1964-04-28 | 1968-07-30 |
-
1976
- 1976-07-05 JP JP7897076A patent/JPS535496A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012009824A (ja) * | 2010-05-11 | 2012-01-12 | Ultratech Inc | ライン結像システム及びレーザアニール方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS535496A (en) | 1978-01-19 |