JPS577642B2 - - Google Patents
Info
- Publication number
- JPS577642B2 JPS577642B2 JP15484775A JP15484775A JPS577642B2 JP S577642 B2 JPS577642 B2 JP S577642B2 JP 15484775 A JP15484775 A JP 15484775A JP 15484775 A JP15484775 A JP 15484775A JP S577642 B2 JPS577642 B2 JP S577642B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15484775A JPS5279953A (en) | 1975-12-26 | 1975-12-26 | Film thickness monitor for thin film production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15484775A JPS5279953A (en) | 1975-12-26 | 1975-12-26 | Film thickness monitor for thin film production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5279953A JPS5279953A (en) | 1977-07-05 |
| JPS577642B2 true JPS577642B2 (ja) | 1982-02-12 |
Family
ID=15593187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15484775A Granted JPS5279953A (en) | 1975-12-26 | 1975-12-26 | Film thickness monitor for thin film production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5279953A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5872213A (ja) * | 1981-10-27 | 1983-04-30 | Fujitsu Ltd | 研摩磁性塗膜の厚さ制御方法 |
| JPS5973709A (ja) * | 1982-10-20 | 1984-04-26 | Ulvac Corp | 光学膜形成装置における膜厚監視装置 |
| JPH03237304A (ja) * | 1990-02-14 | 1991-10-23 | Anelva Corp | 薄膜作製装置 |
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1975
- 1975-12-26 JP JP15484775A patent/JPS5279953A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5279953A (en) | 1977-07-05 |