JPS577641B2 - - Google Patents
Info
- Publication number
- JPS577641B2 JPS577641B2 JP13784874A JP13784874A JPS577641B2 JP S577641 B2 JPS577641 B2 JP S577641B2 JP 13784874 A JP13784874 A JP 13784874A JP 13784874 A JP13784874 A JP 13784874A JP S577641 B2 JPS577641 B2 JP S577641B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13784874A JPS5163645A (ja) | 1974-11-30 | 1974-11-30 | Makuatsukenshutsusochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13784874A JPS5163645A (ja) | 1974-11-30 | 1974-11-30 | Makuatsukenshutsusochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5163645A JPS5163645A (ja) | 1976-06-02 |
| JPS577641B2 true JPS577641B2 (ja) | 1982-02-12 |
Family
ID=15208209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13784874A Granted JPS5163645A (ja) | 1974-11-30 | 1974-11-30 | Makuatsukenshutsusochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5163645A (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53106759U (ja) * | 1977-01-31 | 1978-08-28 | ||
| CH634424A5 (fr) * | 1978-08-18 | 1983-01-31 | Nat Res Dev | Procede et appareil de detection et de commande de depot d'une pellicule fine. |
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1974
- 1974-11-30 JP JP13784874A patent/JPS5163645A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5163645A (ja) | 1976-06-02 |