JPS5776406A - Displacement detector in both side lapping plate - Google Patents

Displacement detector in both side lapping plate

Info

Publication number
JPS5776406A
JPS5776406A JP55151405A JP15140580A JPS5776406A JP S5776406 A JPS5776406 A JP S5776406A JP 55151405 A JP55151405 A JP 55151405A JP 15140580 A JP15140580 A JP 15140580A JP S5776406 A JPS5776406 A JP S5776406A
Authority
JP
Japan
Prior art keywords
plate
surface plate
plates
driving shaft
high accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55151405A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644126B2 (cs
Inventor
Hatsuyuki Arai
Isao Nagahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Speedfam Corp
Original Assignee
SUPIIDE FUAMU KK
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK, Speedfam Corp filed Critical SUPIIDE FUAMU KK
Priority to JP55151405A priority Critical patent/JPS5776406A/ja
Publication of JPS5776406A publication Critical patent/JPS5776406A/ja
Publication of JPS644126B2 publication Critical patent/JPS644126B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/30—Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP55151405A 1980-10-30 1980-10-30 Displacement detector in both side lapping plate Granted JPS5776406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55151405A JPS5776406A (en) 1980-10-30 1980-10-30 Displacement detector in both side lapping plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55151405A JPS5776406A (en) 1980-10-30 1980-10-30 Displacement detector in both side lapping plate

Publications (2)

Publication Number Publication Date
JPS5776406A true JPS5776406A (en) 1982-05-13
JPS644126B2 JPS644126B2 (cs) 1989-01-24

Family

ID=15517864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55151405A Granted JPS5776406A (en) 1980-10-30 1980-10-30 Displacement detector in both side lapping plate

Country Status (1)

Country Link
JP (1) JPS5776406A (cs)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195446U (cs) * 1986-06-02 1987-12-12
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space
US7137867B2 (en) 2005-02-25 2006-11-21 Speedfam Co., Ltd. Thickness control method and double side polisher
US7147541B2 (en) 2005-02-25 2006-12-12 Speedfam Co., Ltd. Thickness control method and double side polisher
CN102538645A (zh) * 2011-12-26 2012-07-04 天津天海同步科技股份有限公司 一种锥齿轮综合检测仪
CN106064339A (zh) * 2015-04-20 2016-11-02 不二越机械工业株式会社 双面抛光设备和抛光方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62195446U (cs) * 1986-06-02 1987-12-12
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space
US7137867B2 (en) 2005-02-25 2006-11-21 Speedfam Co., Ltd. Thickness control method and double side polisher
US7147541B2 (en) 2005-02-25 2006-12-12 Speedfam Co., Ltd. Thickness control method and double side polisher
CN102538645A (zh) * 2011-12-26 2012-07-04 天津天海同步科技股份有限公司 一种锥齿轮综合检测仪
CN106064339A (zh) * 2015-04-20 2016-11-02 不二越机械工业株式会社 双面抛光设备和抛光方法

Also Published As

Publication number Publication date
JPS644126B2 (cs) 1989-01-24

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