JPS577240B2 - - Google Patents
Info
- Publication number
- JPS577240B2 JPS577240B2 JP4958979A JP4958979A JPS577240B2 JP S577240 B2 JPS577240 B2 JP S577240B2 JP 4958979 A JP4958979 A JP 4958979A JP 4958979 A JP4958979 A JP 4958979A JP S577240 B2 JPS577240 B2 JP S577240B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4958979A JPS55141600A (en) | 1979-04-21 | 1979-04-21 | Etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4958979A JPS55141600A (en) | 1979-04-21 | 1979-04-21 | Etching apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55141600A JPS55141600A (en) | 1980-11-05 |
| JPS577240B2 true JPS577240B2 (ja) | 1982-02-09 |
Family
ID=12835407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4958979A Granted JPS55141600A (en) | 1979-04-21 | 1979-04-21 | Etching apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55141600A (ja) |
-
1979
- 1979-04-21 JP JP4958979A patent/JPS55141600A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55141600A (en) | 1980-11-05 |