JPS5771126U - - Google Patents

Info

Publication number
JPS5771126U
JPS5771126U JP14697480U JP14697480U JPS5771126U JP S5771126 U JPS5771126 U JP S5771126U JP 14697480 U JP14697480 U JP 14697480U JP 14697480 U JP14697480 U JP 14697480U JP S5771126 U JPS5771126 U JP S5771126U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14697480U
Other languages
Japanese (ja)
Other versions
JPS6117933Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14697480U priority Critical patent/JPS6117933Y2/ja
Publication of JPS5771126U publication Critical patent/JPS5771126U/ja
Application granted granted Critical
Publication of JPS6117933Y2 publication Critical patent/JPS6117933Y2/ja
Expired legal-status Critical Current

Links

JP14697480U 1980-10-17 1980-10-17 Expired JPS6117933Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14697480U JPS6117933Y2 (cg-RX-API-DMAC7.html) 1980-10-17 1980-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14697480U JPS6117933Y2 (cg-RX-API-DMAC7.html) 1980-10-17 1980-10-17

Publications (2)

Publication Number Publication Date
JPS5771126U true JPS5771126U (cg-RX-API-DMAC7.html) 1982-04-30
JPS6117933Y2 JPS6117933Y2 (cg-RX-API-DMAC7.html) 1986-05-31

Family

ID=29506508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14697480U Expired JPS6117933Y2 (cg-RX-API-DMAC7.html) 1980-10-17 1980-10-17

Country Status (1)

Country Link
JP (1) JPS6117933Y2 (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142561U (cg-RX-API-DMAC7.html) * 1985-02-21 1986-09-03
US9230826B2 (en) 2010-08-26 2016-01-05 Semiconductor Energy Laboratory Co., Ltd. Etching method using mixed gas and method for manufacturing semiconductor device
US9257561B2 (en) 2010-08-26 2016-02-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142561U (cg-RX-API-DMAC7.html) * 1985-02-21 1986-09-03
US9230826B2 (en) 2010-08-26 2016-01-05 Semiconductor Energy Laboratory Co., Ltd. Etching method using mixed gas and method for manufacturing semiconductor device
US9257561B2 (en) 2010-08-26 2016-02-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
JPS6117933Y2 (cg-RX-API-DMAC7.html) 1986-05-31

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