JPS577097Y2 - - Google Patents

Info

Publication number
JPS577097Y2
JPS577097Y2 JP13035176U JP13035176U JPS577097Y2 JP S577097 Y2 JPS577097 Y2 JP S577097Y2 JP 13035176 U JP13035176 U JP 13035176U JP 13035176 U JP13035176 U JP 13035176U JP S577097 Y2 JPS577097 Y2 JP S577097Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13035176U
Other languages
Japanese (ja)
Other versions
JPS5348591U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13035176U priority Critical patent/JPS577097Y2/ja
Publication of JPS5348591U publication Critical patent/JPS5348591U/ja
Application granted granted Critical
Publication of JPS577097Y2 publication Critical patent/JPS577097Y2/ja
Expired legal-status Critical Current

Links

JP13035176U 1976-09-27 1976-09-27 Expired JPS577097Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13035176U JPS577097Y2 (en) 1976-09-27 1976-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13035176U JPS577097Y2 (en) 1976-09-27 1976-09-27

Publications (2)

Publication Number Publication Date
JPS5348591U JPS5348591U (en) 1978-04-24
JPS577097Y2 true JPS577097Y2 (en) 1982-02-10

Family

ID=28739495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13035176U Expired JPS577097Y2 (en) 1976-09-27 1976-09-27

Country Status (1)

Country Link
JP (1) JPS577097Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759346A (en) * 1980-09-29 1982-04-09 Nec Kyushu Ltd Auxiliary holder for semiconductor substrate
JPS612341A (en) * 1984-06-15 1986-01-08 Hitachi Ltd Article transfer jig

Also Published As

Publication number Publication date
JPS5348591U (en) 1978-04-24

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