JPS576694B2 - - Google Patents
Info
- Publication number
- JPS576694B2 JPS576694B2 JP8775477A JP8775477A JPS576694B2 JP S576694 B2 JPS576694 B2 JP S576694B2 JP 8775477 A JP8775477 A JP 8775477A JP 8775477 A JP8775477 A JP 8775477A JP S576694 B2 JPS576694 B2 JP S576694B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8775477A JPS5422172A (en) | 1977-07-20 | 1977-07-20 | Etching method for multiple semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8775477A JPS5422172A (en) | 1977-07-20 | 1977-07-20 | Etching method for multiple semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5422172A JPS5422172A (en) | 1979-02-19 |
| JPS576694B2 true JPS576694B2 (en) | 1982-02-06 |
Family
ID=13923719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8775477A Granted JPS5422172A (en) | 1977-07-20 | 1977-07-20 | Etching method for multiple semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5422172A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0334394Y2 (en) * | 1985-06-14 | 1991-07-22 |
-
1977
- 1977-07-20 JP JP8775477A patent/JPS5422172A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0334394Y2 (en) * | 1985-06-14 | 1991-07-22 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5422172A (en) | 1979-02-19 |