JPS576692B2 - - Google Patents
Info
- Publication number
- JPS576692B2 JPS576692B2 JP8688375A JP8688375A JPS576692B2 JP S576692 B2 JPS576692 B2 JP S576692B2 JP 8688375 A JP8688375 A JP 8688375A JP 8688375 A JP8688375 A JP 8688375A JP S576692 B2 JPS576692 B2 JP S576692B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8688375A JPS5210681A (en) | 1975-07-15 | 1975-07-15 | Method for treating surface of semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8688375A JPS5210681A (en) | 1975-07-15 | 1975-07-15 | Method for treating surface of semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5210681A JPS5210681A (en) | 1977-01-27 |
| JPS576692B2 true JPS576692B2 (enExample) | 1982-02-06 |
Family
ID=13899218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8688375A Granted JPS5210681A (en) | 1975-07-15 | 1975-07-15 | Method for treating surface of semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5210681A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58218122A (ja) * | 1982-05-10 | 1983-12-19 | Internatl Rectifier Corp Japan Ltd | 半導体装置の製造方法 |
| JPS6199347A (ja) * | 1984-10-19 | 1986-05-17 | Fujitsu Ltd | 半導体装置の製造方法 |
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1975
- 1975-07-15 JP JP8688375A patent/JPS5210681A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5210681A (en) | 1977-01-27 |