JPS5766856U - - Google Patents

Info

Publication number
JPS5766856U
JPS5766856U JP14275680U JP14275680U JPS5766856U JP S5766856 U JPS5766856 U JP S5766856U JP 14275680 U JP14275680 U JP 14275680U JP 14275680 U JP14275680 U JP 14275680U JP S5766856 U JPS5766856 U JP S5766856U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14275680U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14275680U priority Critical patent/JPS5766856U/ja
Publication of JPS5766856U publication Critical patent/JPS5766856U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14275680U 1980-10-08 1980-10-08 Pending JPS5766856U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14275680U JPS5766856U (enrdf_load_stackoverflow) 1980-10-08 1980-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14275680U JPS5766856U (enrdf_load_stackoverflow) 1980-10-08 1980-10-08

Publications (1)

Publication Number Publication Date
JPS5766856U true JPS5766856U (enrdf_load_stackoverflow) 1982-04-21

Family

ID=29502534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14275680U Pending JPS5766856U (enrdf_load_stackoverflow) 1980-10-08 1980-10-08

Country Status (1)

Country Link
JP (1) JPS5766856U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067700U (ja) * 1983-10-17 1985-05-14 日新ハイボルテージ株式会社 荷電粒子加速装置
JPH01248451A (ja) * 1988-03-29 1989-10-04 Nissin Electric Co Ltd 多価イオン注入装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6067700U (ja) * 1983-10-17 1985-05-14 日新ハイボルテージ株式会社 荷電粒子加速装置
JPH01248451A (ja) * 1988-03-29 1989-10-04 Nissin Electric Co Ltd 多価イオン注入装置

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