JPS5761279A - Deflected ion generator - Google Patents
Deflected ion generatorInfo
- Publication number
- JPS5761279A JPS5761279A JP13583380A JP13583380A JPS5761279A JP S5761279 A JPS5761279 A JP S5761279A JP 13583380 A JP13583380 A JP 13583380A JP 13583380 A JP13583380 A JP 13583380A JP S5761279 A JPS5761279 A JP S5761279A
- Authority
- JP
- Japan
- Prior art keywords
- ion generator
- deflected ion
- deflected
- generator
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13583380A JPS5761279A (en) | 1980-10-01 | 1980-10-01 | Deflected ion generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13583380A JPS5761279A (en) | 1980-10-01 | 1980-10-01 | Deflected ion generator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5761279A true JPS5761279A (en) | 1982-04-13 |
JPS626316B2 JPS626316B2 (en) | 1987-02-10 |
Family
ID=15160837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13583380A Granted JPS5761279A (en) | 1980-10-01 | 1980-10-01 | Deflected ion generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5761279A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009099472A (en) * | 2007-10-18 | 2009-05-07 | Shishido Seidenki Kk | Blast type ion generating device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022118372A (en) | 2021-02-02 | 2022-08-15 | 東京エレクトロン株式会社 | Substrate processing apparatus, substrate processing method, and storage medium |
-
1980
- 1980-10-01 JP JP13583380A patent/JPS5761279A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009099472A (en) * | 2007-10-18 | 2009-05-07 | Shishido Seidenki Kk | Blast type ion generating device |
Also Published As
Publication number | Publication date |
---|---|
JPS626316B2 (en) | 1987-02-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3162741D1 (en) | Plasma generator | |
GB2080053B (en) | Electric generating systems | |
JPS56141069A (en) | Generator | |
GB2143957B (en) | Electrical continuimeter | |
GB2081983B (en) | Electrical generator | |
DE3164277D1 (en) | Ion generating apparatus | |
PT75789B (en) | Ion containing vapor generator | |
EP0057730A4 (en) | Electric generator. | |
GB2087200B (en) | An ideogram generator | |
JPS56149815A (en) | Electric part case | |
GB2076220B (en) | Accelerating grid | |
JPS5756891A (en) | Character generator | |
JPS5737431A (en) | Electric dustcloth | |
JPS56150959A (en) | Generator | |
DE3167814D1 (en) | Oil-cooled generator | |
JPS5758016A (en) | Spark generator | |
JPS56145663A (en) | Improved ion barrier | |
DE3066485D1 (en) | Ion generator | |
DE3170931D1 (en) | Seismic-wave generator | |
JPS5761279A (en) | Deflected ion generator | |
JPS576887A (en) | Character generator | |
GB2027281B (en) | Ion generator | |
JPS56150960A (en) | Generator | |
JPS5784486A (en) | Character generator | |
JPS5766476A (en) | Character generator |