JPS5761279A - Deflected ion generator - Google Patents

Deflected ion generator

Info

Publication number
JPS5761279A
JPS5761279A JP13583380A JP13583380A JPS5761279A JP S5761279 A JPS5761279 A JP S5761279A JP 13583380 A JP13583380 A JP 13583380A JP 13583380 A JP13583380 A JP 13583380A JP S5761279 A JPS5761279 A JP S5761279A
Authority
JP
Japan
Prior art keywords
ion generator
deflected ion
deflected
generator
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13583380A
Other languages
Japanese (ja)
Other versions
JPS626316B2 (en
Inventor
Daizou Morita
Yoshibumi Akakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP13583380A priority Critical patent/JPS5761279A/en
Publication of JPS5761279A publication Critical patent/JPS5761279A/en
Publication of JPS626316B2 publication Critical patent/JPS626316B2/ja
Granted legal-status Critical Current

Links

JP13583380A 1980-10-01 1980-10-01 Deflected ion generator Granted JPS5761279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13583380A JPS5761279A (en) 1980-10-01 1980-10-01 Deflected ion generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13583380A JPS5761279A (en) 1980-10-01 1980-10-01 Deflected ion generator

Publications (2)

Publication Number Publication Date
JPS5761279A true JPS5761279A (en) 1982-04-13
JPS626316B2 JPS626316B2 (en) 1987-02-10

Family

ID=15160837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13583380A Granted JPS5761279A (en) 1980-10-01 1980-10-01 Deflected ion generator

Country Status (1)

Country Link
JP (1) JPS5761279A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009099472A (en) * 2007-10-18 2009-05-07 Shishido Seidenki Kk Blast type ion generating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022118372A (en) 2021-02-02 2022-08-15 東京エレクトロン株式会社 Substrate processing apparatus, substrate processing method, and storage medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009099472A (en) * 2007-10-18 2009-05-07 Shishido Seidenki Kk Blast type ion generating device

Also Published As

Publication number Publication date
JPS626316B2 (en) 1987-02-10

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