JPS5761188U - - Google Patents
Info
- Publication number
- JPS5761188U JPS5761188U JP13907580U JP13907580U JPS5761188U JP S5761188 U JPS5761188 U JP S5761188U JP 13907580 U JP13907580 U JP 13907580U JP 13907580 U JP13907580 U JP 13907580U JP S5761188 U JPS5761188 U JP S5761188U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980139075U JPS6042235Y2 (ja) | 1980-09-30 | 1980-09-30 | クライオポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980139075U JPS6042235Y2 (ja) | 1980-09-30 | 1980-09-30 | クライオポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5761188U true JPS5761188U (OSRAM) | 1982-04-10 |
| JPS6042235Y2 JPS6042235Y2 (ja) | 1985-12-24 |
Family
ID=29499063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980139075U Expired JPS6042235Y2 (ja) | 1980-09-30 | 1980-09-30 | クライオポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042235Y2 (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226575U (OSRAM) * | 1985-08-01 | 1987-02-18 | ||
| JPS6226576U (OSRAM) * | 1985-08-01 | 1987-02-18 | ||
| JPS62131983A (ja) * | 1985-12-05 | 1987-06-15 | Anelva Corp | クライオポンプ |
| JP2011526981A (ja) * | 2008-07-01 | 2011-10-20 | ブルックス オートメーション インコーポレイテッド | クライオポンプの温度制御を行う装置および方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5124690A (en) * | 1974-08-23 | 1976-02-28 | Teijin Ltd | Horiesuteruno seizoho |
-
1980
- 1980-09-30 JP JP1980139075U patent/JPS6042235Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5124690A (en) * | 1974-08-23 | 1976-02-28 | Teijin Ltd | Horiesuteruno seizoho |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226575U (OSRAM) * | 1985-08-01 | 1987-02-18 | ||
| JPS6226576U (OSRAM) * | 1985-08-01 | 1987-02-18 | ||
| JPS62131983A (ja) * | 1985-12-05 | 1987-06-15 | Anelva Corp | クライオポンプ |
| JP2011526981A (ja) * | 2008-07-01 | 2011-10-20 | ブルックス オートメーション インコーポレイテッド | クライオポンプの温度制御を行う装置および方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6042235Y2 (ja) | 1985-12-24 |