JPS5760894A - Semiconductor device and method of producing same - Google Patents

Semiconductor device and method of producing same

Info

Publication number
JPS5760894A
JPS5760894A JP13657080A JP13657080A JPS5760894A JP S5760894 A JPS5760894 A JP S5760894A JP 13657080 A JP13657080 A JP 13657080A JP 13657080 A JP13657080 A JP 13657080A JP S5760894 A JPS5760894 A JP S5760894A
Authority
JP
Japan
Prior art keywords
semiconductor device
producing same
producing
same
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13657080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138863B2 (enrdf_load_stackoverflow
Inventor
Kenji Nagashima
Hiroshi Oohira
Hiroshi Matsumoto
Masataka Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP13657080A priority Critical patent/JPS5760894A/ja
Priority to EP19810107748 priority patent/EP0048992B1/en
Priority to DE8181107748T priority patent/DE3176951D1/de
Publication of JPS5760894A publication Critical patent/JPS5760894A/ja
Publication of JPS6138863B2 publication Critical patent/JPS6138863B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Insulated Metal Substrates For Printed Circuits (AREA)
JP13657080A 1980-09-30 1980-09-30 Semiconductor device and method of producing same Granted JPS5760894A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP13657080A JPS5760894A (en) 1980-09-30 1980-09-30 Semiconductor device and method of producing same
EP19810107748 EP0048992B1 (en) 1980-09-30 1981-09-29 Printed circuit board and method for fabricating the same
DE8181107748T DE3176951D1 (en) 1980-09-30 1981-09-29 Printed circuit board and method for fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13657080A JPS5760894A (en) 1980-09-30 1980-09-30 Semiconductor device and method of producing same

Publications (2)

Publication Number Publication Date
JPS5760894A true JPS5760894A (en) 1982-04-13
JPS6138863B2 JPS6138863B2 (enrdf_load_stackoverflow) 1986-09-01

Family

ID=15178338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13657080A Granted JPS5760894A (en) 1980-09-30 1980-09-30 Semiconductor device and method of producing same

Country Status (1)

Country Link
JP (1) JPS5760894A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005175427A (ja) * 2003-12-05 2005-06-30 Internatl Resistive Co Of Texas Lp 熱散逸サポートをもつ発光アセンブリ

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10167557B2 (en) 2014-03-18 2019-01-01 Asm Ip Holding B.V. Gas distribution system, reactor including the system, and methods of using the same
US10600673B2 (en) 2015-07-07 2020-03-24 Asm Ip Holding B.V. Magnetic susceptor to baseplate seal
US10612137B2 (en) 2016-07-08 2020-04-07 Asm Ip Holdings B.V. Organic reactants for atomic layer deposition
US10605530B2 (en) 2017-07-26 2020-03-31 Asm Ip Holding B.V. Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
US10590535B2 (en) 2017-07-26 2020-03-17 Asm Ip Holdings B.V. Chemical treatment, deposition and/or infiltration apparatus and method for using the same
US10607895B2 (en) 2017-09-18 2020-03-31 Asm Ip Holdings B.V. Method for forming a semiconductor device structure comprising a gate fill metal
USD880437S1 (en) 2018-02-01 2020-04-07 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
US10612136B2 (en) 2018-06-29 2020-04-07 ASM IP Holding, B.V. Temperature-controlled flange and reactor system including same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005175427A (ja) * 2003-12-05 2005-06-30 Internatl Resistive Co Of Texas Lp 熱散逸サポートをもつ発光アセンブリ

Also Published As

Publication number Publication date
JPS6138863B2 (enrdf_load_stackoverflow) 1986-09-01

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