JPS5760371U - - Google Patents
Info
- Publication number
- JPS5760371U JPS5760371U JP13606180U JP13606180U JPS5760371U JP S5760371 U JPS5760371 U JP S5760371U JP 13606180 U JP13606180 U JP 13606180U JP 13606180 U JP13606180 U JP 13606180U JP S5760371 U JPS5760371 U JP S5760371U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13606180U JPS5760371U (ja) | 1980-09-26 | 1980-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13606180U JPS5760371U (ja) | 1980-09-26 | 1980-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5760371U true JPS5760371U (ja) | 1982-04-09 |
Family
ID=29496192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13606180U Pending JPS5760371U (ja) | 1980-09-26 | 1980-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5760371U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2020230285A1 (ja) * | 2019-05-15 | 2020-11-19 |
-
1980
- 1980-09-26 JP JP13606180U patent/JPS5760371U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2020230285A1 (ja) * | 2019-05-15 | 2020-11-19 | ||
| WO2020230285A1 (ja) * | 2019-05-15 | 2020-11-19 | 株式会社日立ハイテク | 荷電粒子線装置 |
| US11798776B2 (en) | 2019-05-15 | 2023-10-24 | Hitachi High-Tech Corporation | Charged particle beam apparatus |