JPS5760367U - - Google Patents
Info
- Publication number
- JPS5760367U JPS5760367U JP13674880U JP13674880U JPS5760367U JP S5760367 U JPS5760367 U JP S5760367U JP 13674880 U JP13674880 U JP 13674880U JP 13674880 U JP13674880 U JP 13674880U JP S5760367 U JPS5760367 U JP S5760367U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13674880U JPS5760367U (enExample) | 1980-09-26 | 1980-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13674880U JPS5760367U (enExample) | 1980-09-26 | 1980-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5760367U true JPS5760367U (enExample) | 1982-04-09 |
Family
ID=29496852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13674880U Pending JPS5760367U (enExample) | 1980-09-26 | 1980-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5760367U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086728A (ja) * | 1983-10-19 | 1985-05-16 | Natl Inst For Res In Inorg Mater | フイ−ルド・エミツタ− |
| JPH02220337A (ja) * | 1989-02-21 | 1990-09-03 | Matsushita Electric Ind Co Ltd | 電界放出型冷陰極 |
-
1980
- 1980-09-26 JP JP13674880U patent/JPS5760367U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6086728A (ja) * | 1983-10-19 | 1985-05-16 | Natl Inst For Res In Inorg Mater | フイ−ルド・エミツタ− |
| JPH02220337A (ja) * | 1989-02-21 | 1990-09-03 | Matsushita Electric Ind Co Ltd | 電界放出型冷陰極 |