JPS5760367U - - Google Patents

Info

Publication number
JPS5760367U
JPS5760367U JP13674880U JP13674880U JPS5760367U JP S5760367 U JPS5760367 U JP S5760367U JP 13674880 U JP13674880 U JP 13674880U JP 13674880 U JP13674880 U JP 13674880U JP S5760367 U JPS5760367 U JP S5760367U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13674880U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13674880U priority Critical patent/JPS5760367U/ja
Publication of JPS5760367U publication Critical patent/JPS5760367U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP13674880U 1980-09-26 1980-09-26 Pending JPS5760367U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13674880U JPS5760367U (enrdf_load_stackoverflow) 1980-09-26 1980-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13674880U JPS5760367U (enrdf_load_stackoverflow) 1980-09-26 1980-09-26

Publications (1)

Publication Number Publication Date
JPS5760367U true JPS5760367U (enrdf_load_stackoverflow) 1982-04-09

Family

ID=29496852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13674880U Pending JPS5760367U (enrdf_load_stackoverflow) 1980-09-26 1980-09-26

Country Status (1)

Country Link
JP (1) JPS5760367U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086728A (ja) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater フイ−ルド・エミツタ−
JPH02220337A (ja) * 1989-02-21 1990-09-03 Matsushita Electric Ind Co Ltd 電界放出型冷陰極

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086728A (ja) * 1983-10-19 1985-05-16 Natl Inst For Res In Inorg Mater フイ−ルド・エミツタ−
JPH02220337A (ja) * 1989-02-21 1990-09-03 Matsushita Electric Ind Co Ltd 電界放出型冷陰極

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