JPS5760043B2 - - Google Patents

Info

Publication number
JPS5760043B2
JPS5760043B2 JP54066999A JP6699979A JPS5760043B2 JP S5760043 B2 JPS5760043 B2 JP S5760043B2 JP 54066999 A JP54066999 A JP 54066999A JP 6699979 A JP6699979 A JP 6699979A JP S5760043 B2 JPS5760043 B2 JP S5760043B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54066999A
Other languages
Japanese (ja)
Other versions
JPS55159806A (en
Inventor
Masami Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP6699979A priority Critical patent/JPS55159806A/en
Publication of JPS55159806A publication Critical patent/JPS55159806A/en
Publication of JPS5760043B2 publication Critical patent/JPS5760043B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Treating Waste Gases (AREA)
JP6699979A 1979-05-30 1979-05-30 Recovery apparatus of floated solvent Granted JPS55159806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6699979A JPS55159806A (en) 1979-05-30 1979-05-30 Recovery apparatus of floated solvent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6699979A JPS55159806A (en) 1979-05-30 1979-05-30 Recovery apparatus of floated solvent

Publications (2)

Publication Number Publication Date
JPS55159806A JPS55159806A (en) 1980-12-12
JPS5760043B2 true JPS5760043B2 (en) 1982-12-17

Family

ID=13332204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6699979A Granted JPS55159806A (en) 1979-05-30 1979-05-30 Recovery apparatus of floated solvent

Country Status (1)

Country Link
JP (1) JPS55159806A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216602A (en) * 1986-03-18 1987-09-24 Fujitsu Ltd Method for recovering organic solvent
JP2001321601A (en) * 2000-05-12 2001-11-20 Sony Corp Organic solvent discharge reducing method and organic solvent discharge reducing device, wafer drying device

Also Published As

Publication number Publication date
JPS55159806A (en) 1980-12-12

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