JPS5759441U - - Google Patents
Info
- Publication number
- JPS5759441U JPS5759441U JP13631580U JP13631580U JPS5759441U JP S5759441 U JPS5759441 U JP S5759441U JP 13631580 U JP13631580 U JP 13631580U JP 13631580 U JP13631580 U JP 13631580U JP S5759441 U JPS5759441 U JP S5759441U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13631580U JPS5759441U (enExample) | 1980-09-24 | 1980-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13631580U JPS5759441U (enExample) | 1980-09-24 | 1980-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5759441U true JPS5759441U (enExample) | 1982-04-08 |
Family
ID=29496430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13631580U Pending JPS5759441U (enExample) | 1980-09-24 | 1980-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5759441U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59187501A (ja) * | 1983-04-05 | 1984-10-24 | 佐藤 信明 | 粉体、粒体等の脱気定量供給装置 |
| JP2024023223A (ja) * | 2013-03-14 | 2024-02-21 | エーエスエム・アイピー・ホールディング・ベー・フェー | 低温でのＳｉＮの堆積用Ｓｉ前駆体 |
-
1980
- 1980-09-24 JP JP13631580U patent/JPS5759441U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59187501A (ja) * | 1983-04-05 | 1984-10-24 | 佐藤 信明 | 粉体、粒体等の脱気定量供給装置 |
| JP2024023223A (ja) * | 2013-03-14 | 2024-02-21 | エーエスエム・アイピー・ホールディング・ベー・フェー | 低温でのＳｉＮの堆積用Ｓｉ前駆体 |