JPS5759306B2 - - Google Patents

Info

Publication number
JPS5759306B2
JPS5759306B2 JP53102867A JP10286778A JPS5759306B2 JP S5759306 B2 JPS5759306 B2 JP S5759306B2 JP 53102867 A JP53102867 A JP 53102867A JP 10286778 A JP10286778 A JP 10286778A JP S5759306 B2 JPS5759306 B2 JP S5759306B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53102867A
Other languages
Japanese (ja)
Other versions
JPS5531115A (en
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP10286778A priority Critical patent/JPS5531115A/ja
Publication of JPS5531115A publication Critical patent/JPS5531115A/ja
Publication of JPS5759306B2 publication Critical patent/JPS5759306B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP10286778A 1978-08-25 1978-08-25 Anti-contamination, vacuum plasma film-forming apparatus Granted JPS5531115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10286778A JPS5531115A (en) 1978-08-25 1978-08-25 Anti-contamination, vacuum plasma film-forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10286778A JPS5531115A (en) 1978-08-25 1978-08-25 Anti-contamination, vacuum plasma film-forming apparatus

Publications (2)

Publication Number Publication Date
JPS5531115A JPS5531115A (en) 1980-03-05
JPS5759306B2 true JPS5759306B2 (ko) 1982-12-14

Family

ID=14338849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10286778A Granted JPS5531115A (en) 1978-08-25 1978-08-25 Anti-contamination, vacuum plasma film-forming apparatus

Country Status (1)

Country Link
JP (1) JPS5531115A (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599502A (ja) * 1982-07-08 1984-01-18 Sumitomo Light Metal Ind Ltd 内面塗装管の検査方法
JPS632154U (ko) * 1986-06-23 1988-01-08
JPH02141651A (ja) * 1988-11-22 1990-05-31 Mitsui Petrochem Ind Ltd 管内面コート金属管のコート状態検査方法及び装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57111031A (en) * 1980-12-27 1982-07-10 Clarion Co Ltd Sputtering device
JPS58161634U (ja) * 1982-04-21 1983-10-27 日本電気株式会社 反応性イオンプレ−テイング装置
KR100526007B1 (ko) * 2000-12-28 2005-11-08 엘지.필립스 엘시디 주식회사 플라즈마 에칭장치
CN106903412A (zh) * 2017-04-28 2017-06-30 成都大漠石油技术有限公司 利于提高大型管道焊接质量的装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579430A (en) * 1980-06-18 1982-01-18 Hitachi Ltd Electric cleaner

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579430A (en) * 1980-06-18 1982-01-18 Hitachi Ltd Electric cleaner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599502A (ja) * 1982-07-08 1984-01-18 Sumitomo Light Metal Ind Ltd 内面塗装管の検査方法
JPS632154U (ko) * 1986-06-23 1988-01-08
JPH02141651A (ja) * 1988-11-22 1990-05-31 Mitsui Petrochem Ind Ltd 管内面コート金属管のコート状態検査方法及び装置

Also Published As

Publication number Publication date
JPS5531115A (en) 1980-03-05

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