JPS5759119A - Thermal flow meter - Google Patents

Thermal flow meter

Info

Publication number
JPS5759119A
JPS5759119A JP55133720A JP13372080A JPS5759119A JP S5759119 A JPS5759119 A JP S5759119A JP 55133720 A JP55133720 A JP 55133720A JP 13372080 A JP13372080 A JP 13372080A JP S5759119 A JPS5759119 A JP S5759119A
Authority
JP
Japan
Prior art keywords
flow
measured
bridge
heater
flow meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55133720A
Other languages
Japanese (ja)
Inventor
Takao Kato
Katsumi Yoshioka
Takeo Tsuchiya
Tsugio Kumamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55133720A priority Critical patent/JPS5759119A/en
Publication of JPS5759119A publication Critical patent/JPS5759119A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects

Abstract

PURPOSE:To expand a measured flow range by forming a bridge detecting circuit by combining two heater wires of every plural heater coil units provided at the external circumference of a flow pipe. CONSTITUTION:At the external circumference of a flow pipe 2, a few, for example, three heater coil units 40, 50 and 60 are provided and the respective units are composed of two heater wires 31 and 33, 31' and 32, and 32' and 33' respectively. Then, those wires 31 and 31', 32 and 32', and 33 and 33' from bridge circuits and the quantity of flow is measured through one of bridge circuits. In this constitution, when the peak P of a temperature distribution line surpasses the middle point of the coil 50 or 60, an unbalanced voltage proportional to the quantity of flow obtained through the bridge circuit is detected. Therefore, the measured flow range of a thermal flow meter is expanded.
JP55133720A 1980-09-27 1980-09-27 Thermal flow meter Pending JPS5759119A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55133720A JPS5759119A (en) 1980-09-27 1980-09-27 Thermal flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55133720A JPS5759119A (en) 1980-09-27 1980-09-27 Thermal flow meter

Publications (1)

Publication Number Publication Date
JPS5759119A true JPS5759119A (en) 1982-04-09

Family

ID=15111322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55133720A Pending JPS5759119A (en) 1980-09-27 1980-09-27 Thermal flow meter

Country Status (1)

Country Link
JP (1) JPS5759119A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010520459A (en) * 2007-03-01 2010-06-10 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド Method and apparatus for measuring the temperature of a gas in a mass flow controller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010520459A (en) * 2007-03-01 2010-06-10 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド Method and apparatus for measuring the temperature of a gas in a mass flow controller

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