JPS5758872B2 - - Google Patents

Info

Publication number
JPS5758872B2
JPS5758872B2 JP51153867A JP15386776A JPS5758872B2 JP S5758872 B2 JPS5758872 B2 JP S5758872B2 JP 51153867 A JP51153867 A JP 51153867A JP 15386776 A JP15386776 A JP 15386776A JP S5758872 B2 JPS5758872 B2 JP S5758872B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51153867A
Other languages
Japanese (ja)
Other versions
JPS5377489A (en
Inventor
Tadashi Ooya
Tetsuhisa Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taihei Chemicals Ltd
Original Assignee
Taihei Chemicals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taihei Chemicals Ltd filed Critical Taihei Chemicals Ltd
Priority to JP15386776A priority Critical patent/JPS5377489A/ja
Publication of JPS5377489A publication Critical patent/JPS5377489A/ja
Publication of JPS5758872B2 publication Critical patent/JPS5758872B2/ja
Granted legal-status Critical Current

Links

JP15386776A 1976-12-21 1976-12-21 Static holder Granted JPS5377489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15386776A JPS5377489A (en) 1976-12-21 1976-12-21 Static holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15386776A JPS5377489A (en) 1976-12-21 1976-12-21 Static holder

Publications (2)

Publication Number Publication Date
JPS5377489A JPS5377489A (en) 1978-07-08
JPS5758872B2 true JPS5758872B2 (US06534493-20030318-C00166.png) 1982-12-11

Family

ID=15571827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15386776A Granted JPS5377489A (en) 1976-12-21 1976-12-21 Static holder

Country Status (1)

Country Link
JP (1) JPS5377489A (US06534493-20030318-C00166.png)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719831B2 (ja) * 1986-10-13 1995-03-06 日本電信電話株式会社 静電チヤツク
JPS6363491U (US06534493-20030318-C00166.png) * 1986-10-16 1988-04-26
JPH0732148Y2 (ja) * 1987-12-21 1995-07-26 東燃化学株式会社 書画用下敷き
JPH01303079A (ja) * 1988-05-30 1989-12-06 Abisare:Kk フレキシブル差込み端子を有する静電吸着板
JPH0351237A (ja) * 1989-07-20 1991-03-05 Taihei Kagaku Seihin Kk 静電吸着装置
JPH043956A (ja) * 1990-04-20 1992-01-08 Fujitsu Ltd 静電吸着装置
KR20220079655A (ko) 2019-12-13 2022-06-13 미쯔이가가꾸가부시끼가이샤 펠리클의 디마운팅 방법, 및 펠리클의 디마운팅 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441892U (US06534493-20030318-C00166.png) * 1977-08-25 1979-03-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441892U (US06534493-20030318-C00166.png) * 1977-08-25 1979-03-20

Also Published As

Publication number Publication date
JPS5377489A (en) 1978-07-08

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