JPS5758763U - - Google Patents
Info
- Publication number
- JPS5758763U JPS5758763U JP13615580U JP13615580U JPS5758763U JP S5758763 U JPS5758763 U JP S5758763U JP 13615580 U JP13615580 U JP 13615580U JP 13615580 U JP13615580 U JP 13615580U JP S5758763 U JPS5758763 U JP S5758763U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exhaust-Gas Circulating Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13615580U JPS5758763U (enExample) | 1980-09-24 | 1980-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13615580U JPS5758763U (enExample) | 1980-09-24 | 1980-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5758763U true JPS5758763U (enExample) | 1982-04-07 |
Family
ID=29496277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13615580U Pending JPS5758763U (enExample) | 1980-09-24 | 1980-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5758763U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59115649U (ja) * | 1983-01-25 | 1984-08-04 | 九州日本電気株式会社 | 半導体基板立替装置 |
| JPS61125013A (ja) * | 1984-11-16 | 1986-06-12 | ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング | 半導体物質熱処理用炉 |
-
1980
- 1980-09-24 JP JP13615580U patent/JPS5758763U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59115649U (ja) * | 1983-01-25 | 1984-08-04 | 九州日本電気株式会社 | 半導体基板立替装置 |
| JPS61125013A (ja) * | 1984-11-16 | 1986-06-12 | ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング | 半導体物質熱処理用炉 |