JPS5756769U - - Google Patents
Info
- Publication number
- JPS5756769U JPS5756769U JP13213080U JP13213080U JPS5756769U JP S5756769 U JPS5756769 U JP S5756769U JP 13213080 U JP13213080 U JP 13213080U JP 13213080 U JP13213080 U JP 13213080U JP S5756769 U JPS5756769 U JP S5756769U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13213080U JPS6040600Y2 (en) | 1980-09-17 | 1980-09-17 | sauce supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13213080U JPS6040600Y2 (en) | 1980-09-17 | 1980-09-17 | sauce supply device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5756769U true JPS5756769U (en) | 1982-04-02 |
| JPS6040600Y2 JPS6040600Y2 (en) | 1985-12-07 |
Family
ID=29492385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13213080U Expired JPS6040600Y2 (en) | 1980-09-17 | 1980-09-17 | sauce supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6040600Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016172902A (en) * | 2015-03-17 | 2016-09-29 | 東京エレクトロン株式会社 | Raw material gas supplying apparatus and film deposition apparatus |
| JP2017205736A (en) * | 2016-05-20 | 2017-11-24 | 日本エア・リキード株式会社 | Sublimation gas supply system and sublimation gas supply method |
-
1980
- 1980-09-17 JP JP13213080U patent/JPS6040600Y2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016172902A (en) * | 2015-03-17 | 2016-09-29 | 東京エレクトロン株式会社 | Raw material gas supplying apparatus and film deposition apparatus |
| JP2017205736A (en) * | 2016-05-20 | 2017-11-24 | 日本エア・リキード株式会社 | Sublimation gas supply system and sublimation gas supply method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6040600Y2 (en) | 1985-12-07 |