JPS5756208B2 - - Google Patents
Info
- Publication number
- JPS5756208B2 JPS5756208B2 JP54143843A JP14384379A JPS5756208B2 JP S5756208 B2 JPS5756208 B2 JP S5756208B2 JP 54143843 A JP54143843 A JP 54143843A JP 14384379 A JP14384379 A JP 14384379A JP S5756208 B2 JPS5756208 B2 JP S5756208B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14384379A JPS5667926A (en) | 1979-11-08 | 1979-11-08 | Processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14384379A JPS5667926A (en) | 1979-11-08 | 1979-11-08 | Processing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5667926A JPS5667926A (en) | 1981-06-08 |
| JPS5756208B2 true JPS5756208B2 (enExample) | 1982-11-29 |
Family
ID=15348233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14384379A Granted JPS5667926A (en) | 1979-11-08 | 1979-11-08 | Processing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5667926A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439514U (enExample) * | 1990-07-19 | 1992-04-03 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5535687B2 (ja) * | 2010-03-01 | 2014-07-02 | 株式会社荏原製作所 | 基板洗浄方法及び基板洗浄装置 |
-
1979
- 1979-11-08 JP JP14384379A patent/JPS5667926A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439514U (enExample) * | 1990-07-19 | 1992-04-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5667926A (en) | 1981-06-08 |