JPS5756185B2 - - Google Patents
Info
- Publication number
- JPS5756185B2 JPS5756185B2 JP51137336A JP13733676A JPS5756185B2 JP S5756185 B2 JPS5756185 B2 JP S5756185B2 JP 51137336 A JP51137336 A JP 51137336A JP 13733676 A JP13733676 A JP 13733676A JP S5756185 B2 JPS5756185 B2 JP S5756185B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13733676A JPS5362977A (en) | 1976-11-17 | 1976-11-17 | Plane face pressure insulated electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13733676A JPS5362977A (en) | 1976-11-17 | 1976-11-17 | Plane face pressure insulated electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362977A JPS5362977A (en) | 1978-06-05 |
| JPS5756185B2 true JPS5756185B2 (en) | 1982-11-29 |
Family
ID=15196261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13733676A Granted JPS5362977A (en) | 1976-11-17 | 1976-11-17 | Plane face pressure insulated electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5362977A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5366151A (en) * | 1976-11-26 | 1978-06-13 | Hitachi Ltd | Electron gun unit of electron microscope and equivalent unit |
| JP4808879B2 (en) * | 1999-07-09 | 2011-11-02 | アドバンスト・エレクトロン・ビームズ・インコーポレーテッド | Electron accelerator and method for accelerating electrons |
| JP4537191B2 (en) * | 2004-12-20 | 2010-09-01 | 株式会社日立ハイテクノロジーズ | Electron gun |
| EP3817028B1 (en) * | 2018-06-28 | 2022-11-02 | Hitachi High-Tech Corporation | Charged particle beam generation device and charged particle beam device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141259A (en) * | 1974-04-18 | 1975-11-13 |
-
1976
- 1976-11-17 JP JP13733676A patent/JPS5362977A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141259A (en) * | 1974-04-18 | 1975-11-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5362977A (en) | 1978-06-05 |