JPS5754946B2 - - Google Patents

Info

Publication number
JPS5754946B2
JPS5754946B2 JP47077902A JP7790272A JPS5754946B2 JP S5754946 B2 JPS5754946 B2 JP S5754946B2 JP 47077902 A JP47077902 A JP 47077902A JP 7790272 A JP7790272 A JP 7790272A JP S5754946 B2 JPS5754946 B2 JP S5754946B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47077902A
Other languages
Japanese (ja)
Other versions
JPS4936291A (en)van
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47077902A priority Critical patent/JPS5754946B2/ja
Priority to NLAANVRAGE7310667,A priority patent/NL179248C/xx
Publication of JPS4936291A publication Critical patent/JPS4936291A/ja
Publication of JPS5754946B2 publication Critical patent/JPS5754946B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67—Complementary BJTs
    • H10D84/673—Vertical complementary BJTs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP47077902A 1972-08-02 1972-08-02 Expired JPS5754946B2 (en)van)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47077902A JPS5754946B2 (en)van) 1972-08-02 1972-08-02
NLAANVRAGE7310667,A NL179248C (nl) 1972-08-02 1973-08-01 Werkwijze voor het vervaardigen van een geintegreerde halfgeleiderschakeling met complementaire transistoren.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47077902A JPS5754946B2 (en)van) 1972-08-02 1972-08-02

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP557980A Division JPS55102263A (en) 1980-01-21 1980-01-21 Semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS4936291A JPS4936291A (en)van) 1974-04-04
JPS5754946B2 true JPS5754946B2 (en)van) 1982-11-20

Family

ID=13646991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47077902A Expired JPS5754946B2 (en)van) 1972-08-02 1972-08-02

Country Status (2)

Country Link
JP (1) JPS5754946B2 (en)van)
NL (1) NL179248C (en)van)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119069U (en)van) * 1985-01-12 1986-07-26

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190286A (en)van) * 1975-02-05 1976-08-07
JPS6223098Y2 (en)van) * 1979-02-06 1987-06-12
JPS56129338A (en) * 1980-03-14 1981-10-09 Nec Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61119069U (en)van) * 1985-01-12 1986-07-26

Also Published As

Publication number Publication date
JPS4936291A (en)van) 1974-04-04
NL179248B (nl) 1986-03-03
NL7310667A (en)van) 1974-02-05
NL179248C (nl) 1986-08-01

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