JPS5752946Y2 - - Google Patents

Info

Publication number
JPS5752946Y2
JPS5752946Y2 JP7776775U JP7776775U JPS5752946Y2 JP S5752946 Y2 JPS5752946 Y2 JP S5752946Y2 JP 7776775 U JP7776775 U JP 7776775U JP 7776775 U JP7776775 U JP 7776775U JP S5752946 Y2 JPS5752946 Y2 JP S5752946Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7776775U
Other languages
Japanese (ja)
Other versions
JPS51156774U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7776775U priority Critical patent/JPS5752946Y2/ja
Publication of JPS51156774U publication Critical patent/JPS51156774U/ja
Application granted granted Critical
Publication of JPS5752946Y2 publication Critical patent/JPS5752946Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP7776775U 1975-06-09 1975-06-09 Expired JPS5752946Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7776775U JPS5752946Y2 (en) 1975-06-09 1975-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7776775U JPS5752946Y2 (en) 1975-06-09 1975-06-09

Publications (2)

Publication Number Publication Date
JPS51156774U JPS51156774U (en) 1976-12-14
JPS5752946Y2 true JPS5752946Y2 (en) 1982-11-17

Family

ID=28553995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7776775U Expired JPS5752946Y2 (en) 1975-06-09 1975-06-09

Country Status (1)

Country Link
JP (1) JPS5752946Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000009636A (en) * 1998-06-19 2000-01-14 Mitsubishi Heavy Ind Ltd Ellipsometry apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543577A (en) * 1978-09-21 1980-03-27 Canon Inc Light source device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000009636A (en) * 1998-06-19 2000-01-14 Mitsubishi Heavy Ind Ltd Ellipsometry apparatus

Also Published As

Publication number Publication date
JPS51156774U (en) 1976-12-14

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