JPS5752946Y2 - - Google Patents
Info
- Publication number
- JPS5752946Y2 JPS5752946Y2 JP7776775U JP7776775U JPS5752946Y2 JP S5752946 Y2 JPS5752946 Y2 JP S5752946Y2 JP 7776775 U JP7776775 U JP 7776775U JP 7776775 U JP7776775 U JP 7776775U JP S5752946 Y2 JPS5752946 Y2 JP S5752946Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7776775U JPS5752946Y2 (en) | 1975-06-09 | 1975-06-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7776775U JPS5752946Y2 (en) | 1975-06-09 | 1975-06-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51156774U JPS51156774U (en) | 1976-12-14 |
JPS5752946Y2 true JPS5752946Y2 (en) | 1982-11-17 |
Family
ID=28553995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7776775U Expired JPS5752946Y2 (en) | 1975-06-09 | 1975-06-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5752946Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000009636A (en) * | 1998-06-19 | 2000-01-14 | Mitsubishi Heavy Ind Ltd | Ellipsometry apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5543577A (en) * | 1978-09-21 | 1980-03-27 | Canon Inc | Light source device |
-
1975
- 1975-06-09 JP JP7776775U patent/JPS5752946Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000009636A (en) * | 1998-06-19 | 2000-01-14 | Mitsubishi Heavy Ind Ltd | Ellipsometry apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS51156774U (en) | 1976-12-14 |