JPS5751940B2 - - Google Patents
Info
- Publication number
- JPS5751940B2 JPS5751940B2 JP14623675A JP14623675A JPS5751940B2 JP S5751940 B2 JPS5751940 B2 JP S5751940B2 JP 14623675 A JP14623675 A JP 14623675A JP 14623675 A JP14623675 A JP 14623675A JP S5751940 B2 JPS5751940 B2 JP S5751940B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Dicing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14623675A JPS5270752A (en) | 1975-12-10 | 1975-12-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14623675A JPS5270752A (en) | 1975-12-10 | 1975-12-10 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5270752A JPS5270752A (en) | 1977-06-13 |
| JPS5751940B2 true JPS5751940B2 (enFirst) | 1982-11-05 |
Family
ID=15403173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14623675A Granted JPS5270752A (en) | 1975-12-10 | 1975-12-10 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5270752A (enFirst) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5401983A (en) * | 1992-04-08 | 1995-03-28 | Georgia Tech Research Corporation | Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices |
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1975
- 1975-12-10 JP JP14623675A patent/JPS5270752A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5270752A (en) | 1977-06-13 |