JPS5751605B2 - - Google Patents
Info
- Publication number
- JPS5751605B2 JPS5751605B2 JP50051723A JP5172375A JPS5751605B2 JP S5751605 B2 JPS5751605 B2 JP S5751605B2 JP 50051723 A JP50051723 A JP 50051723A JP 5172375 A JP5172375 A JP 5172375A JP S5751605 B2 JPS5751605 B2 JP S5751605B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50051723A JPS51126864A (en) | 1975-04-28 | 1975-04-28 | Mass flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50051723A JPS51126864A (en) | 1975-04-28 | 1975-04-28 | Mass flow meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51126864A JPS51126864A (en) | 1976-11-05 |
| JPS5751605B2 true JPS5751605B2 (ja) | 1982-11-02 |
Family
ID=12894797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50051723A Granted JPS51126864A (en) | 1975-04-28 | 1975-04-28 | Mass flow meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51126864A (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282427A (ja) * | 1988-05-09 | 1989-11-14 | Nec Corp | 流量制御装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48106761U (ja) * | 1972-03-14 | 1973-12-11 |
-
1975
- 1975-04-28 JP JP50051723A patent/JPS51126864A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51126864A (en) | 1976-11-05 |