JPS5751252B2 - - Google Patents
Info
- Publication number
- JPS5751252B2 JPS5751252B2 JP3724780A JP3724780A JPS5751252B2 JP S5751252 B2 JPS5751252 B2 JP S5751252B2 JP 3724780 A JP3724780 A JP 3724780A JP 3724780 A JP3724780 A JP 3724780A JP S5751252 B2 JPS5751252 B2 JP S5751252B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3724780A JPS56133821A (en) | 1980-03-24 | 1980-03-24 | Equipment for vapor growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3724780A JPS56133821A (en) | 1980-03-24 | 1980-03-24 | Equipment for vapor growth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56133821A JPS56133821A (en) | 1981-10-20 |
| JPS5751252B2 true JPS5751252B2 (en) | 1982-11-01 |
Family
ID=12492292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3724780A Granted JPS56133821A (en) | 1980-03-24 | 1980-03-24 | Equipment for vapor growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56133821A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59120353U (en) * | 1983-01-31 | 1984-08-14 | 株式会社日立ホームテック | Incomplete combustion prevention device |
| JPS6066952U (en) * | 1983-10-05 | 1985-05-13 | 東京瓦斯株式会社 | Incomplete combustion safety device |
-
1980
- 1980-03-24 JP JP3724780A patent/JPS56133821A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59120353U (en) * | 1983-01-31 | 1984-08-14 | 株式会社日立ホームテック | Incomplete combustion prevention device |
| JPS6066952U (en) * | 1983-10-05 | 1985-05-13 | 東京瓦斯株式会社 | Incomplete combustion safety device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56133821A (en) | 1981-10-20 |