JPS5750047B2 - - Google Patents
Info
- Publication number
- JPS5750047B2 JPS5750047B2 JP6385276A JP6385276A JPS5750047B2 JP S5750047 B2 JPS5750047 B2 JP S5750047B2 JP 6385276 A JP6385276 A JP 6385276A JP 6385276 A JP6385276 A JP 6385276A JP S5750047 B2 JPS5750047 B2 JP S5750047B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6385276A JPS52146560A (en) | 1976-05-31 | 1976-05-31 | Electrode plating apparatus for semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6385276A JPS52146560A (en) | 1976-05-31 | 1976-05-31 | Electrode plating apparatus for semiconductor devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52146560A JPS52146560A (en) | 1977-12-06 |
| JPS5750047B2 true JPS5750047B2 (pm) | 1982-10-25 |
Family
ID=13241269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6385276A Granted JPS52146560A (en) | 1976-05-31 | 1976-05-31 | Electrode plating apparatus for semiconductor devices |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52146560A (pm) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5827651B2 (ja) * | 1978-03-29 | 1983-06-10 | 日本電気ホームエレクトロニクス株式会社 | 半導体装置の製造方法 |
-
1976
- 1976-05-31 JP JP6385276A patent/JPS52146560A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52146560A (en) | 1977-12-06 |