JPS5749831A - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
JPS5749831A
JPS5749831A JP12461080A JP12461080A JPS5749831A JP S5749831 A JPS5749831 A JP S5749831A JP 12461080 A JP12461080 A JP 12461080A JP 12461080 A JP12461080 A JP 12461080A JP S5749831 A JPS5749831 A JP S5749831A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
annular
pressure difference
measuring diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12461080A
Other languages
Japanese (ja)
Inventor
Yukio Takahashi
Yasushi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12461080A priority Critical patent/JPS5749831A/en
Publication of JPS5749831A publication Critical patent/JPS5749831A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To manufacture a rigid transducer which can withstand large pressure by fixing the annular thick part, which is provided at the outer peripheral part of a piezoelectric transducing element which senses the pressure difference by receiving the pressures on both sides, to a metallic supporting member via annular glass. CONSTITUTION:A pressure difference sensing part 12 enclosing a measuring diaphragm 56 is communicated to a pressure receiving part 10 with high and low pressure chambers 20 and 22, overload protection chambers 26 and 28, and pressure introducing paths 32, 34, 36, and 38, and high and low pressure sealing parts are formed. Non-compressible oil is sealed in the inside. High and low sealing diaphragm 16 and 18 and a center diaphragm 24 are welded to a main body 14. The measuring diaphragm 56 comprises N type single crystal silicon, and has the thin part 62, which is to become an annular strain yielding part, between a central rigid body 58 and an outer fixing part 60. A plurality of P type gauge resistors 64 are formed in the thin part, a Wheatstone bridge is assembled, and the differential output is obtained. The measuring diaphragm 56 is fixed to a sensor main body 70 via the annular glass 66 and a hollow metallic supporting table 68. In this constitution, the transducer which can withstand the large pressure difference can be formed.
JP12461080A 1980-09-10 1980-09-10 Pressure transducer Pending JPS5749831A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12461080A JPS5749831A (en) 1980-09-10 1980-09-10 Pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12461080A JPS5749831A (en) 1980-09-10 1980-09-10 Pressure transducer

Publications (1)

Publication Number Publication Date
JPS5749831A true JPS5749831A (en) 1982-03-24

Family

ID=14889684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12461080A Pending JPS5749831A (en) 1980-09-10 1980-09-10 Pressure transducer

Country Status (1)

Country Link
JP (1) JPS5749831A (en)

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