JPS5749390Y2 - - Google Patents
Info
- Publication number
- JPS5749390Y2 JPS5749390Y2 JP3783577U JP3783577U JPS5749390Y2 JP S5749390 Y2 JPS5749390 Y2 JP S5749390Y2 JP 3783577 U JP3783577 U JP 3783577U JP 3783577 U JP3783577 U JP 3783577U JP S5749390 Y2 JPS5749390 Y2 JP S5749390Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3783577U JPS5749390Y2 (cs) | 1977-03-30 | 1977-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3783577U JPS5749390Y2 (cs) | 1977-03-30 | 1977-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53133578U JPS53133578U (cs) | 1978-10-23 |
| JPS5749390Y2 true JPS5749390Y2 (cs) | 1982-10-29 |
Family
ID=28901637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3783577U Expired JPS5749390Y2 (cs) | 1977-03-30 | 1977-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5749390Y2 (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666036A (en) * | 1979-11-05 | 1981-06-04 | Canon Inc | Wafer positioner |
| JPS5933248U (ja) * | 1982-08-27 | 1984-03-01 | 日本真空技術株式会社 | ウエハのフアセツト合せ装置 |
-
1977
- 1977-03-30 JP JP3783577U patent/JPS5749390Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53133578U (cs) | 1978-10-23 |